The application of X-ray techniques for studies of the interface structure of Co/Cu multilayers has been presented with a pre-deposited ultrathin film of Bi and Pb. The [Co(1 nm)/Cu(2 nm)] multilayers were thermally evaporated at very low deposition rates with a small amount of Bi and Pb surfactant (about 0.2 ML) introduced at each Cu layer. The structure of Co/Cu multilayers with added surfactant has been studied using low-angle specular and nonspecular X-ray reflectivity. In all studied specimens, the off-specular reflectivity replicates some of the features of specular reflectivity. The presence in diffuse spectra of a Bragg peak due to coherent scattering, as well as visible finite thickness clearly indicates a high degree of conformality and interface roughness replication in the surfactant mediated Co/Cu multilayers. X-ray reflectivity as well as X-ray diffuse scattering measurements showed a distinct variation in the structure of the multilayers with introduction of surfactant which leads to well-ordered periodic structures with small roughness.
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