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LTCC glass-ceramics based on diopside/cordierite/Al2O3 for ultra-high frequency applications

Synkiewicz-Musialska Beata

Scientiae Radices

2023

Vol. 2, Iss. 2

190--201

In this work, three glass-ceramic composites based on a commercial SiO2-B2O3-Al2O3-CaO-MgO glass and cordierite, diopside or Al2O3 were used for preparation of green tapes and low temperature cofired ceramics (LTCC) substrates. The thermal behavior, phase composition, microstructure and dielectric properties of the fabricated glass-ceramics were characterized using a heating microscope, thermal analysis, X-ray diffraction, scanning electron microscopy and time domain spectroscopy. The applicability of the developed materials for LTCC technology was demonstrated by the preparation of test multilayer substrates. The glass-ceramic substrates exhibit advantageous properties for ultra-high frequency LTCC applications, including low sintering temperatures of 900-980°C, good compatibility with commercial Ag and AgPd conductive pastes and a low dielectric permittivity of 3.5-7 at 1 THz.