Sn matrix soft overlays for the three-layer plain bearings were prepared by ECR-DC hybrid sputtering. Overlays with Vickers hardness between 5-20Hv, measured at loads of 49mN, were obtained by using pure Sn and Ag-Sn composite targets with Ag/Sn target area ratios of 0.5/44.5 - 6/39. The hardness of the overlays across the wear scar exhibited progressive increase due to densification of coatings and work hardening during the sliding. The physical and mechanical properties of the overlays were also analyzed by optical microscopy (OM), scanning electron microscopy (SEM), electron probe microanalysis (EPMA) and tribological tests were performed using a CSEM type ball-on-disk tribometer.
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