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Modeling of vibrating angular. Motion sensor in Matlab/SIMULINK

Nazdrowicz Jacek

International Journal of Microelectronics and Computer Science

2018

Vol. 9, nr 1

27--32

This paper presents different models and results of simulations of MEMS vibrating gyroscope in Matlab/SIMULINK environment. Each model is created with different approach, using different blocks and different physics. Therefore author presents his proposal of mathematical, electrical equivalent and physical models. Results obtained from these models can give some hints regarding design and dimensions of some crucial parts of MEMS gyroscope. Here, decoupled vibrating sensor is considered, which minimize drive and sense motion mutual influence.