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The influence of coating fabrication processes on the optical efficiency of replicated Moiré diffraction gratings

Ribeiro J. E.

Metrology and Measurement Systems

2013

Vol. 20, nr 1

119-126

One of the most important parameters in the study of diffraction gratings is their optical efficiency. This paper analyzes the different manufacturing processes to cover gratings of Moiré interferometry and their influence on the quality and absolute efficiency of replicated gratings on the surfaces of specimens. The Moiré interferometry is a field measurement technique that has been used in many different fields such as applied mechanics, microelectronics, biomechanics or micromechanics, hence the importance of this study. The applied reflected coating was done by sputtering and aluminium vaporization processes. In this work different materials and thickness layers were analyzed. The obtained coatings have a high degree of reflectivity on the replicated gratings.