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Plasma chemistry in non-equilibrium discharges: discharge physics and applications

Kogelschatz U.

Transactions of the Institute of Fluid-Flow Machinery

2007

nr 119

55-64

Non-equilibrium (coid) pIasmas operated at or close to atmospheric pressure have become very important. Recent progress in the operation of corona discharges and dieIectric-barrier discharges and their appIications is discussed. New Iarge-volume appIications include high-power excimer uItraviolet lamps, excimer based fluorescent Iamps and Iarge-area flat pIasma display panels. Novel processes include the treatment of large gas flows for odour and pollution control and the selective functionalization of flat surfaces, fibres, fabrics and powders. Further innovative applications can be expected from the combination of recentIy developed microcavity pIasma devices, DBD operation and microfabrication technologies suited for mass production. Large arrays of parallei miniature non-equilibrium discharges can be operated simuItaneously. If small apertures are used gas can be fed through these microplasmas, thus creating the unique possibility to combine microreactor technology with non-equilibrium plasma chemistry and possibly also catalysis.