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The surface, thin films and coatings of engineering components play a key role in their quality, properties and application. The surface and near by its region is characterized by its chemical and phase composition, surface tension, viscosity, energy, residual stresses (RS) and mechanical features like roughness, waveness etc. The RS becomes more and more important property of the surfaces and coatings because of their influence on physical, chemical and mechanical properties. This is for the reason of its superposition with loading and important influence of RS on physical, chemical structural and microstructural phenomena e.g. stress induced phase transformation, piezoelectricity, linear relation of resistivity vs. RS and stress-induced self-disintegration etc. Phase composition and RS are usually examined by X-ray diffraction with Bragg-Bretano geometry. The effective depth of penetration (EDoP) for this case changes versus theta angle. New geometry i.e. grazing angle scattering (GAS) geometry avoids above inconvenience. Although most methods of measurements of residual stresses are still under development they become more and more accurate. The non-destructive diffraction methods of measurement of various kind of residual stresses are suitable for surface examinations.
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