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1 Transactions of the Institute of Fluid-Flow Machinery

1 2007

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Microwave microdischarges of low-power at atmospheric pressure

Jasiński M., Goch M., Zakrzewski Z., Mizeraczyk J.

Transactions of the Institute of Fluid-Flow Machinery

2007

nr 119

29-38

In this paper we present a simple and cheap microwave (2.45 GHz) source of microdischarges in argon and neon at atmospheric pressure. The source consisted of a cheap 2.45 GHz microwave magnetron generator and 50... coaxial line terminated with a simple coaxial plasma applicator. The new microwave source of microdischarges operated stable in the form of a smalI plasma jet at absorbed microwave powers of 9-80 W and gas flow rates of 0.5-25 l/min. The length and diameter of plasma jets were 1.5-14 mm and 0.5-1.5 mm, respectively, depending on the kind of gas, gas flow rate and microwave power absorbed by the discharge. The temperature of the plasma jets could be changed from 30°C to 1200°C by changing the gas flow rate or/and absorbed microwave power. The electron density in the plasma jet was around 3 . 10 _14 cm-3 1.1 .10 _15 cm -3, depending on the discharge conditions.