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Manufacturing of highly ordered porous anodic alumina with conical pore shape and tunable interpore distance in the range of 550 nm to 650 nm

Norek M., Łażewski M.

Materials Science Poland

2017

Vol. 35, No. 3

511--518

In this work, highly ordered porous anodic alumina (PAA) with tapered pore structure and interpore distance (Dc) in the range of 550 nm to 650 nm were fabricated. To produce hexagonal close-packed pore structure a two-step process, combining anodization in etidronic acid electrolyte in the first step and high-concentration, high-temperature anodization in citric acid electrolyte in the second step, was applied. The Al pre-patterned surface obtained in the first anodization was used to produce regular tapered pore arrays by subsequent and alternating anodization in 20 wt.% citric acid solution and pore wall etching in 10 wt.% phosphoric acid solution. The height of the tapered pores was ranging between 2.5 μm and 8.0 μm for the PAA with Dc = 550 nm and Dc = 650 nm, respectively. The geometry of the obtained graded structure can be used for a production of efficient antireflective coatings operating in IR spectral region.

New designs for graded refractive index antireflection coatings

Mahdjoub A., Zighed L.

Engineering Transactions

2005

Vol. 53, iss. 2

185-196

The constant progress in thin layers technology, especially the graded index inhomogeneous dielectrics, allows the realization of antireflection coatings (ARC) that are less sensitive to thickness and to the incidence angle. Graded refractive index silicon oxynitrides are deposited by Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition (ECR-PECVD) controlled in-situ by monochromatic ellipsometry. While avoiding the complexity of the classical multilayer ARCs, the obtained AR coatings permit to obtain the same performances, or furthermore to improve the cells efficiency. Different suggested profiles are optimized by simulation, then they are realized and characterized by spectroscopic ellipsometry and reflectance measurement. The photogenerated current can be enhanced by 45%, and weighted reflectance (between 300 and 1100 nm) reduced to 5.6%. The passivating properties of oxinitrides recommend the use of these AR coatings on texturized surfaces. The weighted reflectance would decrease to less than 1% and short-circuit current will thus be enhanced by 52.79%.