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1 Materials Science Poland

1 2007

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The effect of spin coating rate on the microstructure, grain size, surface roughness and thickness of Ba0.6Sr0.4TiO3 thin film prepared by the sol-gel process

Dewi R., Baa'yah N. I., Talib I. A.

Materials Science Poland

2007

Vol. 25, No. 3

657--662

The paper reports on the effect of spin coating rate during the sol-gel process on the microstructure, grain size, surface roughness and thickness of barium strontium titanate (Ba0.6Sr0.4TiO3) thin films. Variable coating rates do not influence the microstructure of the films. All films are polycrystalline and single phase, as was found from X-ray diffraction analysis. Changing the spin rates also does not influence the grain sizes of the films. All films have nanometer particle size ranging from 37.2 nm to 30.7 nm. However, roughness and thickness of the film depend on the spin coating rates. The highest spin rates produce the thinnest film with the roughest surface, while the lowest spin rate produced the thickest films with the smoothest surface.