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Organization of silica spherical particles into different shapes on silicon substrates

Korusiewicz B., Maruszewski K.

Materials Science Poland

2007

Vol. 25, No. 3

835--841

One of the classes of materials that can be obtained via the sol-gel method are uniform sub-micron silica spherical particles. When deposited on a substrate, they typically form random patterns. In this work, we introduce a method allowing one to influence the shape of the structures created on a substrate by the silica spheres. The silica spherical particles with diameter of about 500 nm where deposited on silicon substrates using a simple process of sedimentation. Various structures, like grooves and pits, were earlier prepared by wet etching on surfaces of these silicon substrates. The process led to arranging the silica spheres within the silicon structures, reproducing the shapes of the substrates. The preliminary results are documented by the images from a scanning electron microscope (SEM). Further research on improvement of the patterns forming is under way.

Nowe meble chłodnicze

Korusiewicz B.

Chłodnictwo i Klimatyzacja

2004

nr 7

45-45