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Silicon 9 MHz MEMS Based Oscillator with Low Phase Noise and High Quality Factor

Lo Conte F., Grogg F. D., Ionescu A. M., Kayal M.

Electronics and Telecommunications Quarterly

2009

Vol. 55, No 4

625-637

A 9.4MHz micro-electromechanical oscillator based on a Vibrating Body Field Effect Transistor (VB-FET) is presented in this work. The electrical characteristics of this active MEM resonator are detailed for static and dynamic operation. In open-loop configuration the tuning fork resonator provide a quality factor of 9400. The benefit of the intrinsic gain for oscillator design is analyzed and an oscillator design is proposed based on these findings. The proposed oscillator is fully CMOS compatible. The achieved performance shows the advantages of an active MEM resonator for the construction of MEM based oscillators