Wyniki wyszukiwania - BazTech

Ograniczanie wyników

Znaleziono wyników: 2

Liczba wyników na stronie

Wyniki wyszukiwania

Sortuj według:

Ogranicz wyniki do:

Treatment of odour gas from air stream by a multi-channel corona torch - adsorbent filter hybrid system

Urashima K., Chang J., Karibe F., Hashimoto M., Urashima K., Chang J., Karibe F., Hashimoto M.

Transactions of the Institute of Fluid-Flow Machinery

2000

Nr 107

101-110

The odour gases such as ammonia, H2S, VOCs etc. generate significant problems during product processing and it will be influencing to the semiconductor device manufacturing yields in a clean room operation. In this work, the experimental study on the removal of a trace ammonia gas from air stream was carriedout by a corona torch - adsorbend hybrid system. The corona torch - adsorbent hybrid system consist of a multi-channel hollow electrode type corona torch, and sheet type adsorbend (Pureline* by Nippon Puretec Co., Ltd.,), where this adsorbend can be operated under room to elevated temperatures. Experiments were conducted for the gas flow rate from 0.42 to 0.84 Nm3/h., the applied voltage from 22 to 34 kV and the ammonia initial concentration from 60 to 120 ppm. An ammonia concentration was measured by the ammonia monitoring system (Pure Mate*, by Nippon Puretec Co.,) and the gas detector (Gastec*, by Gastec Co., Ltd.,). The results show that the remowal efficiency of ammonia increases with increasing applied power and up to 120 g of ammonia can be removed by 1 kWh of electric power inputs.

Usuwanie gazów wonnych z powietrz za pomocą kombinowanego układu filtra adsorbującego z reaktorami wyładowania typu "corona torch". Gazy wonne takie jak amoniak, siarkowodór czy lotne związki organiczne stwarzają szereg problemów przy produkcji półprzewodników. Praca dotyczy usuwania amoniaku ze strumienia powietrza za pomocą systemu składającego się z kilku reaktorów wyładowania elektrycznego typu "corona torch" i adsorbera (Piruline*, firmy Nippon Puretec). Natężenie przepływu powietrza podczas badań eksperymentalnych wynosiło 0,42-0,84 m3/h, napięcie zasilania 22-34 kV, a stężenie początkowe amoniaku w powietrzu 60-120 ppm. Stężenie amoniaku mierzono za pomocą układu monitoryjącego Pure Mate* , firmy Nippon Puretec, i detektora gazów firmy Gastec. Wyniki badań wskazują na możliwość usuwania za pomocą opracowanego systemu do 120 g amoniaku na 1 kWh doprowadzonej mocy.

Influence of oxygen and humidity in atmospheres on friction and wear characteristics of TiN and TiC

Yang L., Yamamoto Y., Hashimoto M.

Applied Mechanics and Engineering

1999

Vol. 4, no spec.

195-200

The friction and wear characteristics of hot pressed TiN and TiC were examined in dry and wet atmospheres of oxygen and argon using a pin/disc type friction tester. In an atmosphere containing oxygen or humidity, for both TiN and TiC, a surface film composed mainly of titanium oxides and/or their hydrates were produced during runs. The formation of the surface films resulted in suppressing brittle fracture of the rubbing surfaces and reducing wear amount by a factor of 4 to 30. TiC has high ability to form TiO2 with low shear strength compared to TiN. In contrast, TiN is expected to keep a TiO2 film firmly through TiO formed on the TiN surface as the substrate of TiO2, since a lattice constant and interatomic distances of TiN are nearly equal to those of TiO. Therefore, a low friction of about 0.1 was attained with a combination of TiC pins and TiN disc.