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ACdTe X-ray imaging device using vertical thin film field emitter array

Tsunekawa Y., Nakagawa N., Neo Y., Morii H., Aokia T., Mimura H., Nagao M., Yoshidab T., Kanemaru S.

Journal of Automation Mobile Robotics and Intelligent Systems

2009

Vol. 3, No. 4

137-139

We have demonstrated the novel CdTe X-ray imaging device that consists of a Schottky CdTe diode and a Vertical Thin Film Field Emitter Array (VTF-FEA). The Schottky CdTe diode was fabricated by deposied indium (In) thin film on a Cl-doped p-type (p-type) CdTe substrate and Sb2S3 on the opposite side of the CdTe substrate. VTF-FEA was fabricated by ion induced bending (IIB) and etch-back method. The signal current was successfully detected by the recombination of the stored on the surface holes with the emitted electrons from FEA, and it was clarified that it depended on the X-ray intensity. And the imaging device succeeded in obtaining the Cu plate transmission image.