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Computer-Aided Design of MEMS at System Level

Teslyuk V., Al Omari T., Alshavabkekh H., Denysyuk P., Melnyk M.

Machine Dynamics Problems

2007

Vol. 31, No. 3

92-104

MEMS is an extraordinarily scientific devices (Luchinin, 1999; Severov et al., 1998; Klimov et al., 1999). Their effective design is not possible without implementation of software, new mathematical models and methods, methodology and algorithms for the automated design. The given paper is devoted to development of methodology for the computer-aided design of MEMS at system level. In the offered paper the methodology is developed for the automated MEMS design at a system level which is based on the use of basic elements MEMS, building alternative decision tree and on its basis generation of alternative decisions set, usage of method of reduction of power of alternative decisions set which takes into account specific MEMS and parameters of requirement specification and decision of the formulated multicriterion optimization task for determination of optimal structure of integrated device. The offered method will allow designing MEMS automatically more efficienty.