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Experimental study of non-measured points on surface measurement using structured illumination microscopy

Li Zhen, Gröger Sophie

Metrology and Measurement Systems

2022

Vol. 29, nr 4

763--778

Non-measured points (NMPs) are one of vital problems in optical measurement. The number and location of NMPs affect the obtained surface texture parameters. Therefore, systematic studying of the NMP is meaningful in understanding the instrument performance and optimizing measurement strategies. This paper investigates the influence of measurement settings on the non-measured points ratio (NMPR) using structured illumination microscopy. It is found that using a low magnification lens, high exposure time, high dynamic range (HDR) lighting levels, and low vertical scanning interval may help reduce the NMPR. In addition, an improved approach is proposed to analyze the influence of NMP on areal surface texture parameters. The analysis indicates that the influence of NMP on some parameters cannot be ignored, especially for extreme height parameters and feature parameters.

Investigation of noise in surface topography measurement using structured illumination microscopy

Li Zhen, Gröger Sophie

Metrology and Measurement Systems

2021

Vol. 28, nr 4

767--779

Noise is a fundamental metrological characteristic of the instrument in surface topography measurement. Therefore, measurement noise should be thoroughly studied in practical measurement to understand instrument performance and optimize measurement strategy. This paper investigates the measurement noise at different measurement settings using structured illumination microscopy. The investigation shows that the measurement noise may scatter significantly among different measurement settings. Eliminating sample tilt, selecting low vertical scanning interval and high exposure time is helpful to reduce the measurement noise. In order to estimate the influence of noise on the measurement, an approach based on metrological characteristics is proposed. The paper provides a practical guide to understanding measurement noise in a wide range of applications.