Transmission electron microscopy (TEM) is a powerful diagnostic tool for the determination of structure/property relationships of materials. A comprehensive analysis of materials requires a combined use of a variety of complementary electron microscopical techniques of imaging, diffraction and spectroscopy at an atomic level of magnitude. The possibilities and limitations of quantitative TEM analysis will be demonstrated for interface studies of the following materials and materials systems: Nickel-based superalloy CMSX-10, (Zn,Cd)O/ZnO/Al2O3, (Al,Ga)N/AlN/Al2O3, GaN/LiAlO2 and FeCo-based nanocrystalline alloys.
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