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UV detectors and focal plane array imagerss based on AlGaN p-i-n photodiodes

Long J. P., Varadaraajan J., Matthews J., Schetzina J. F.

Opto-Electronics Review

2002

Vol. 10, No. 4

251-260

The successful development of both discrete UV photodiodes and large-format UV imaging arrays consisting of 128x128 and 320x256 AlGaN p-i-n photodiodes is reported. Detectors and detector arrays have been succesfully developed to sense radiation in the 300-365 nm visible-blind and 240-285 nm solar-blind portions of the UV spectral region. Details of the device synthesis and processing are discussed, including flip-chip bonding procedures employed to mate the UV photodiode arrays to silicon read - out integrated circuits (ROICs). A selection of UV images obtained using these new large-format UV digital imagers is in included.