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Fabrication of photonic crystal structures by laser lithography

Mizeikis V., Seet K. K., Juodkazis S., Misawa H.

Journal of Automation Mobile Robotics and Intelligent Systems

2009

Vol. 3, No. 4

99-101

Using femtosecond laser lithography technique, we have fabricated 3D PhC structures having woodpile and spiral architectures in photoresists, and investigated their photonic properties. The fabricated structures exhibit good structural quality, evidenced by long-range periodicity and absence of deformations, and photonic stop-gaps at nearinfrared and infrared wavelengths, evidenced by spectral bands of high reflectivity. These structures can be used as templates for further enhancement by infiltration of metals or high refractive index materials, such as Si.