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On roughness measurement by angular speckle correlation

Salazar F., Belenguer T., García J., Ramos G.

Metrology and Measurement Systems

2012

Vol. 19, nr 2

373-380

In this work, the influence of both characteristics of the lens and misalignment of the incident beams on roughness measurement is presented. To investigate how the focal length and diameter affect the degree of correlation between the speckle patterns, a set of experiments with different lenses is performed. On the other hand, the roughness when the beams separated by an amount are non-coincident at the same point on the sample is measured. To conclude the study, the uncertainty of the method is calculated.