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1 2002

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The Structire and Certain Properties of the Pzt-Type Thin Film Transducers

Surowiak Z., Kupriyanov M., Czekaj D., Gomes M., Kofanova N., Kuprina Y., Tshebanova E.

Molecular and Quantum Acoustics

2002

Vol. 23

405-412

By means of X-ray diffraction analysis and Raman spectroscopy the process of crystallisation of PZT-type thin films was studied. RF-magnetron sputtering of the multicomponent ceramic targert ((Pb0.97Ba0.01Ca0.01Sr0.005)(Zr0.52Ti0.46)O3 + 1.4wt.%Bi2O3 + 0.3wt.%GeO) employed to the thin film fabrication. Policrystaline thin films deffering in thickness, content of rhombohedral and tetragonal phases, elementary cell parameters, as well as relative content of pyrochlore and perovskite phases have been obtained. Results of investigation into the pyrochlore-perovskite reconstructive phase transitions (RPT) are discussed. On the basis of the experimental measurements as well as the crystal-chemical analysis of mutal realtions between fluorite-type structure, pyrochlore-type structire, C-phase of rare earths, and perovskite-type structure, an atempt to determine possible mechanism of the observed PRT have been indertaken.