Structural, Electrical, and Optical Properties of ZnO Films Grown by Atomic Layer Deposition at Low Temperature

• Autorzy: Park Ji-Young , Weon Ye Bin , Jung Myeong Jun , Choi Byung Joon

Identyfikatory

DOI

10.24425/amm.2022.141082

• Języki publikacji: EN

Abstrakty

EN

Zinc oxide (ZnO) is a prominent n-type semiconductor material used in optoelectronic devices owing to the wide bandgap and transparency. The low-temperature growth of ZnO thin films expands diverse applications, such as growth on glass and organic materials, and it is also cost effective. However, the optical and electrical properties of ZnO films grown at low temperatures may be inferior owing to their low crystallinity and impurities. In this study, ZnO thin films were prepared by atomic layer deposition on SiO₂ and glass substrates in the temperature range of 46-141℃. All films had a hexagonal würtzite structure. The carrier concentration and electrical conductivity were also investigated. The low-temperature grown films showed similar carrier concentration (a few 1019 cm^-3 at 141°C), but possessed lower electrical conductivity compared to high-temperature (>200°C) grown films. The optical transmittance of 20 nm thin ZnO film reached approximately 90% under visible light irradiation. Additionally, bandgap energies in the range of 3.23-3.28 eV were determined from the Tauc plot. Overall, the optical properties were comparable to those of ZnO films grown at high temperature.

Słowa kluczowe

EN

zinc oxide; ZnO; atomic layer deposition; low temperature growth; optoelectronic properties

• Wydawca: Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences
• Czasopismo: Archives of Metallurgy and Materials
• Rocznik: 2022
• Tom: Vol. 67, iss. 4
• Strony: 1503--1506
• Opis fizyczny: Bibliogr. 16 poz., wykr.

Twórcy

autor

Park Ji-Young

• Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea

• https://orcid.org/0000-0003-4713-4754

autor

Weon Ye Bin

• Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea

• https://orcid.org/0000-0003-1880-4333

autor

Jung Myeong Jun

• Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea

• https://orcid.org/0000-0002-6953-7549

autor

Choi Byung Joon

• Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea

• https://orcid.org/0000-0003-1920-8162

Bibliografia

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Uwagi

1. This study was financially supported by the Seoul National University of Science and Technology.

2. Opracowanie rekordu ze środków MEiN, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2022-2023).