Two-step dual-wavelength interferometry for surface relief retrieval

• Autorzy: Kmet Arkady B. , Muravsky Leonid I. , Voronyak Taras I. , Stasyshyn Ihor V.

Identyfikatory

DOI

10.5277/oa190213

• Języki publikacji: EN

Abstrakty

EN

The new two-step dual-wavelength interferometry method that uses only two pairs of interferograms for surface relief retrieval is proposed. In this method, two interferograms in each pair are differed only by an arbitrary phase shift of a reference wave. The method allows using only one out-of-plane shift of a reference wave to record each second interferogram in both pairs, since arbitrary phase shifts between interferograms in each pair can be defined by calculation of the correlation coefficient between two interferograms. This method can extract separately areal surface roughness and areal waviness phase maps from a phase map of the total surface relief and reduce errors produced during the surface relief retrieving. Computer simulation and experimental verification have confirmed the reliability of the proposed method.

Słowa kluczowe

EN

dual-wavelength interferometry; two-step phase shifting interferometry; blind phase shift; surface relief retrieval; areal surface roughness; areal waviness; phase map

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2019
• Tom: Vol. 49, nr 2
• Strony: 331--343
• Opis fizyczny: Bibliogr. 16 poz., rys.

Twórcy

autor

Kmet Arkady B.

• Karpenko Physico-Mechanical Institute of the NAS of Ukraine, 5 Naukova St., 79060 Lviv, Ukraine

autor

Muravsky Leonid I.

• Karpenko Physico-Mechanical Institute of the NAS of Ukraine, 5 Naukova St., 79060 Lviv, Ukraine

autor

Voronyak Taras I.

• Karpenko Physico-Mechanical Institute of the NAS of Ukraine, 5 Naukova St., 79060 Lviv, Ukraine

autor

Stasyshyn Ihor V.

• Karpenko Physico-Mechanical Institute of the NAS of Ukraine, 5 Naukova St., 79060 Lviv, Ukraine

Bibliografia

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Uwagi

PL

Opracowanie rekordu w ramach umowy 509/P-DUN/2018 ze środków MNiSW przeznaczonych na działalność upowszechniającą naukę (2019).