Quantum mechanical aspects in the MEMS/NEMS technology

• Autorzy: Słowik O. , Orłowska K. , Kopiec D. , Janus P. , Grabiec P. , Gotszalk T.
• Języki publikacji: EN

Abstrakty

EN

According to the scaling laws for nanomechanical resonators, many of their metrological properties improve when downscaled. This fact encourages for constant miniaturization of MEMS/NEMS based sensors. It is a well known fact, that the laws of classical physics cannot be used to describe the systems which are arbitrarily small. In consequence, the classical description of nanoresonators must break down for sufficiently small and cool systems and then the quantum effects cannot be neglected. One of the fundamental question which arises is, how one may investigate quantum effects in MEMS/NEMS sensors and what is the influence of quantum effects on the performance of such systems. In this paper we would like to raise those issues by presenting the results of our work related to our estimations and calculations of MEMS/NEMS dynamics. The first and second sections are of theoretical character. In the first section (Classical modeling), we describe the classical methods for describing the resonator dynamics and the classical limit on the resolution of MEMS/NEMS based force sensors, which is set by the thermomechanical noise. In the second section (Quantum aspects), we concentrate on the quantum description of micro and nanoresonators and the influence of quantum effects, such as zero-point motion and back-action, on their performance (quantum limits). The third section is devoted to the presentation of our experimental methods of MEMS/NEMS deflection metrology, i.e. Optical Beam Deflection method (OBD) and fibre optics interferometry.

Słowa kluczowe

EN

MEMS; NEMS; OBD; FOI; quantum; force; resolution

• Wydawca: Wydawnictwo PAK
• Czasopismo: Measurement Automation Monitoring
• Rocznik: 2016
• Tom: Vol. 62, No. 3
• Strony: 87--91
• Opis fizyczny: Bibliogr. 23 poz., rys., wzory

Twórcy

autor

Słowik O.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, 11/17 Z. Janiszewskiego St., PL-50372 Wrocław, Poland

autor

Orłowska K.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, 11/17 Z. Janiszewskiego St., Pl-50372 Wrocław, Poland

autor

Kopiec D.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, 11/17 Z. Janiszewskiego St., Pl-50372 Wrocław, Poland

autor

Janus P.

• Institute of Electron Technology, 32/46 Lotników Ave., PL-02668 Warszawa, Poland

autor

Grabiec P.

• Institute of Electron Technology, 32/46 Lotników Ave., PL-02668 Warszawa, Poland

autor

Gotszalk T.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, 11/17 Z. Janiszewskiego St. ,Pl-50372 Wrocław, Poland

Bibliografia

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Uwagi

PL

Opracowanie ze środków MNiSW w ramach umowy 812/P-DUN/2016 na działalność upowszechniającą naukę