Growth and Characterisation of Pulsed-Laser Deposited Tin Thin Films on Cube-Textured Copper at Different Temperatures

Szwachta, G.; Gajewska, M.; Kąc, S.

doi:10.1515/amm-2016-0174

Artykuł - szczegóły

Tytuł artykułu

Growth and Characterisation of Pulsed-Laser Deposited Tin Thin Films on Cube-Textured Copper at Different Temperatures

Autorzy

Szwachta G. , Gajewska M. , Kąc S.

Treść / Zawartość

Pełne teksty:

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Identyfikatory

DOI

10.1515/amm-2016-0174

Warianty tytułu

Języki publikacji

Abstrakty

High-quality titanium nitride thin films have been grown on a cube-textured copper surface via pulsed laser deposition. The growth of TiN thin films has been very sensitive to pre-treatment procedure and substrate temperature. It is difficult to grow heteroexpitaxial TiN films directly on copper tape due to large differences in lattice constants, thermal expansion coefficients of the two materials as well as polycrystalline structure of substrate. The X-Ray diffraction measurement revealed presence of high peaks belonged to TiN(200) and TiN(111) thin films, depending on used etcher of copper surface. The electron diffraction patterns of TiN(200)/Cu films confirmed the single-crystal nature of the films with cube-on-cube epitaxy. The high-resolution microscopy on our films revealed sharp interfaces between copper and titanium nitride with no presence of interfacial reaction.

Słowa kluczowe

thin films coated conductors deposition PLD microstructure

Wydawca

Institute of Metallurgy and Materials Science of Polish Academy of Sciences
Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences

Czasopismo

Archives of Metallurgy and Materials

Rocznik

2016

Tom

Vol. 61, iss. 2B

Strony

1031--1038

Opis fizyczny

Bibliogr. 53 poz., rys., tab., wykr.

Twórcy

autor

Szwachta G.

AGH University of Science and Technology, Faculty of Metals Engineering and Industrial Computer Science, Al. A. Mickiewicza 30, 30-059 Krakow, Poland
AGH University of Science and Technology, Academic Centre for Materials and Nanotechnology, Al. A. Mickiewicza 30, 30-059 Krakow, Poland

autor

Gajewska M.

AGH University of Science and Technology, Academic Centre for Materials and Nanotechnology, Al. A. Mickiewicza 30, 30-059 Krakow, Poland

autor

Kąc S.

AGH University of Science and Technology, Faculty of Metals Engineering and Industrial Computer Science, Al. A. Mickiewicza 30, 30-059 Krakow, Poland

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Uwagi

This work was supported by the AGH University of Science and Technology under Grant No. 15.11.110.349. The authors thank J. Kusiński (AGH University of Science and Technology) for discussions and for his helpful suggestions regarding TEM and SAED pattern image analyses. The technical assistance from The Nanostructures and Nanodevices Research Line of Academic Centre for Materials and Nanotechnology AGH is also acknowledged.

Opracowanie ze środków MNiSW w ramach umowy 812/P-DUN/2016 na działalność upowszechniającą naukę

Typ dokumentu

Bibliografia

Identyfikator YADDA

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