Mechanical Behavior and Modeling of Initially Stressed Membranes

• Autorzy: Maj C. , Zając P. , Szermer M. , Lobur M
• Języki publikacji: EN

Abstrakty

EN

Modeling of microstructures is one of the most important step in the project. In its early stage the analytical modeling is usually used. The need of use of as fast as possible method is a primary source of errors for each designer. The simple analytical model is commonly used in order to obtain basic performance of the device. However, it is the source of error due to some simplifications. In this paper, the comparison between the analytical model and FEM simulation is presented taking into consideration maximal membrane deflection, membrane form and stress distribution. The initial stress of the membrane has been taken into account as a primary source of mismatch. Finally, the error depending of initial stress has been estimated. All simulations has been performed for small deflection of the membrane.

Słowa kluczowe

EN

MEMS; membrane; modelling; initial stress

• Wydawca: Oficyna Wydawnicza Politechniki Warszawskiej
• Czasopismo: Machine Dynamics Research
• Rocznik: 2013
• Tom: Vol. 37, No. 2
• Strony: 65--70
• Opis fizyczny: Bibliogr. 3 poz.

Twórcy

autor

Maj C.

• Lodz University of Technology, Department of Microelectronics and Computer Science, Poland

autor

Zając P.

• Lodz University of Technology, Department of Microelectronics and Computer Science, Poland

autor

Szermer M.

• Lodz University of Technology, Department of Microelectronics and Computer Science, Poland

autor

Lobur M

• Lviv Polytechnic National University

Bibliografia

• 1. S. Timoshenko, 1959, Theory of plates and shells (2nd edition), McGraw-Hill, 1959.
• 2. S. Timoshenko, 1963, Theory of elastic stability (2nd edition), McGraw-Hill, 1963.
• 3. B. Moussa, 1985, “Conception, modélisation et réalisation d’un capteur de pression capacitif microélectronique”, PhD Thesis, Université Paul Sabatier (Toulouse), 1985.