Crystallographic texture and anisotropy of electrolytic deposited copper coating analysis

• Autorzy: Skrzypek S. J. , Ratuszek W. , Bunsch A. , Witkowska M. , Kowalska J. , Goły M. , Chruściel K.
• Języki publikacji: EN

Abstrakty

EN

Purpose: To investigate of texture and microstructure of electrodeposited copper thin films. Design/methodology/approach: Influence of the electrodepositing parameters e.g. applied electric current as variable on texture formation of copper films was studied at presented work. Experiment was done for copper deposition from sulphate bath under galvanostatic and pulse current with different additives in the bath. X-ray examination included texture measurements phase analysis by means of Bragg-Brentano, grazing incidence diffraction and crystallite size using broadening of X-ray diffraction line. Findings: Electrodeposited copper coatings exhibit different texture and microstructure depending on applied conditions in which they were obtained. Pulse and direct current conditions leads to different texture of electrodeposited copper coatings. For each type of current texture depends on deposition time and current intensity. Only in some cases {111} component was obtained. Research limitations/implications: extures of the investigated samples are very sensitive for applied current conditions of electrodepositing. At the copper coatings obtained with reverse current texture components {110} is dominating one. Relations between texture and properties (hardness, Young module and grain size) of copper layer were found. Originality/value: The texture of electrodeposited copper should be influential structural characteristic when anisotropy is considered. It is already known that electromigration depends on texture of copper films.

Słowa kluczowe

EN

copper films; texture; electrodepositing

PL

folia miedziana; tekstura; elektroosadzanie

• Wydawca: International OCSCO World Press
• Czasopismo: Journal of Achievements in Materials and Manufacturing Engineering
• Rocznik: 2010
• Tom: Vol. 43, nr 1
• Strony: 264--268
• Opis fizyczny: Bibliogr. 16 poz., rys., tab., wykr.

Twórcy

autor

Skrzypek S. J.

• AGH-University of Science and Technology, Al. Mickiewicza 30, 30-059 Kraków, Poland

autor

Ratuszek W.

• AGH-University of Science and Technology, Al. Mickiewicza 30, 30-059 Kraków, Poland

autor

Bunsch A.

• AGH-University of Science and Technology, Al. Mickiewicza 30, 30-059 Kraków, Poland

autor

Witkowska M.

• AGH-University of Science and Technology, Al. Mickiewicza 30, 30-059 Kraków, Poland

autor

Kowalska J.

• AGH-University of Science and Technology, Al. Mickiewicza 30, 30-059 Kraków, Poland

autor

Goły M.

• AGH-University of Science and Technology, Al. Mickiewicza 30, 30-059 Kraków, Poland

autor

Chruściel K.

• AGH-University of Science and Technology, Al. Mickiewicza 30, 30-059 Kraków, Poland

Bibliografia

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• [10] H.J. Bunge, Matematischen Methoden der Texturanalyese, Berlin Akademie-Verlag, 1969.
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• [12] B.D. Cullity, S.R. Stock, Elements of X-ray Diffraction, Prenttice Hall (2003).
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• [14] S.J. Skrzypek, New approach to residual macro-stresses measurement due to grazing angle X-ray diffraction geometry, Dissertations and Monographs 108, Institutional Learning and Scientific Publishing AGH, Cracow, 2002.
• [15] L.A. Dobrzański, S.J. Skrzypek, D. Pakuáa, J. Mikuła, Residual macro-stresses of PVD and CVD coatings deposited on tool ceramics substrates measured with application of the grazing angle X-ray diffraction geometyry, Contemporary Achievements In Mechanics, Manufacturing And Materials Science (2005) 271-276.
• [16] S. J.Skrzypek, T. Borowski, J. Jeleńkowski, T. Wierzchoń, Gradient like structural properties of nitrogen–saturated austenite layers produced on N27T2JMnM steel, Contemporary Achievements In Mechanics, Manufacturing And Materials Science (2005) 1102-1105.