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VHDL-Ams Model of the Integrated Membrane Micro-Accelerometer with Delta-Sigma (Δσ) Analog-To-Digital Converter for Schematic Design Level

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Języki publikacji
EN
Abstrakty
EN
VHDL-Ams model of integrated membrane type micro-accelerometer with delta-sigma (ΔΣ) analog-to-digital converter for schematic design level was developed. It allows simulating movement of the sensitive element working weigh from the applied acceleration, differential capacitor and original signal capacity change, signal digitizing with the help of DeltaSigma ADC with defined micro-accelerometer structural parameters, and analyzze an integrated device at the schemotechnical design level.
Twórcy
  • Ternopil Technical National University of Ivan Polyuj,
autor
  • Lviv Polytechnic National University
autor
  • Lviv Polytechnic National University
Bibliografia
  • 1. Yazdi N., Ayazi F. and Najafi K. 1998. Micromachined inertial sensors, Proc. IEEE, vol. 86, no. 8, 1640-1659.
  • 2. Maluf N. and Williams K. 2004. An Introduction to Microelectromechanical Systems Engineering. Artech House Inc. 305 p.
  • 3. Teslyuk V., Pereyma M., Denysyuk P., Chimich I. 2006. Computer-aided system for MEMS design “ProMIP”. Proc. of the 2nd Inter. Conf. of Young Scientists on Perspective Technologies and Methods in MEMS Design, MEMSTECH 2006, Lviv–Polyana, Ukraine, 49-52.
  • 4. MEMS & Sensors for Mobile Phones and Tablets, 2014. Yole Developpment. 22.
  • 5. Akila Kannan. 2008. Design and Modeling of a MEMS-Based Accelerometer with Pull In Analysis. Thesis, University of British Columbia, 149.
  • 6. Teslyuk V., Kushnir Y., Zaharyuk R. and Pereyma M. 2007. A Computer Aided Analysis of a Capacitive Accelerometer Parameters. Proceeding of the 9th International Conference on The Experience of Designing and Application of CAD Systems in Microelectronics, CADSM’2007, Lviv – Polyana, Ukraine, 19-24 Feb. 548 – 550.
  • 7. Teslyuk V., Al Omari T., Alshavabkekh H., Denysyuk P. and Melnyk M. 2007. Computer-Aided Design of MEMS at system level. Machine Dynamics Problems, Vol.31, 92 -104.
  • 8. Standard VHDL Analog and Mixed-Signal Extensions. 2003. Packages for Multiple Energy Domain Support. 21.
  • 9. Ashenden P.J. 2004. EDA CONSULTANT, ASHENDEN DESIGNS PTY. Elsevier Science, 84.
  • 10. Pavel V. and Richard Shi C.-J. 2005. VHDLAMS based modeling and simulation of mixedtechnology Microsystems. 261.
  • 11. Verilog-AMS Language Reference Manual Analog & Mixed-Signal Extentions to Verilog-HDL, Version 2.1. 2003. 279.
  • 12. Zaharyuk R., Teslyuk V., Farmaga I. and AlShawabkeh H.A.Y. 2008. VHDL-AMS – Model for capacitive interdigital accelerometer. Proceeding of the 4th International Conference of Young Scientists on Perspective Technologies and Methods in MEMS Design, MEMSTECH, Lviv-Polyana, Ukraine. 134-137.
  • 13. Virtuoso AMS Designer. Available online at <http://www.cadence.com/products/cic/ams_designer/pages/default.aspx>.
  • 14. SystemVision. Available online at <http://www.mentor.com/- products/sm/system_integration_simulation_analysis/systemvision/>.
  • 15. hAMSter Software for VHDL-AMS Simulations. Available online at <http://www.theoinf.tuilmenau.de/~twangl/VHDLAMS_online_en/Home.html>.
  • 16. SMASH Mixed-Signal Simulator. Availableonline at <http://www.dolphin.fr /index.php/eda_solutions/products/smash/overview>.
  • 17. Napieralski A., Napieralska M., Szermer M. and Maj C. 2012. The evolution of MEMS and modeling methodologies, COMPEL. The International Journal for computation and Mathematics in Electrical and Electronic Engineering. Vol.31, 1458 – 1469.
  • 18. Augustyniak I., Knapkiewicz P. and Dziuban J. 2012. Modeling and tests of silicon-glass structure of dose high-energy radiation MEMS sensor. PRZEGLĄD ELEKTROTECHNICZNY. Vol.11b, 272-274.
  • 19. Fraden J. 2010. Handbook of Modern Sensors. Physics, Designs, and Applications (Fourth Edition). Springer Science+Business Media. 681.
  • 20. Kempe V. 2011. Inertial MEMS Principles and Practice. Cambridge University Press. 492.
  • 21. Pelesko J. A. and Bernstein D. H. 2002. Modeling MEMS and NEMS. Chapman & Hall/CRC. 384.
  • 22. Baker B. 2011. How delta-sigma ADC work, Part 1. Texas Instruments Incorporated. Analog Applications Journal. 6.
  • 23. Baker B. 2011. How delta-sigma ADC work, Part 2. Texas Instruments Incorporated. Analog Applications Journal. 5.
  • 24. Reiss J. D. 2008. UNDERSTANDING SIGMA– DELTA MODULATION: The Solved and Unsolved Issues. – J Audio Eng. Soc., Vol. 56, No. 1/2. 16.
  • 25. Kozak M. and Kale I. 2003. Oversampled Delta-Sigma Modulators: Analysis, Applications and Novel Topologies. Kluwer Academic Publishers, Dordrecht, The Netherlands.
  • 26. Zhao C. and Kazmierski T. 2007. An efficient and accurate MEMS Accelerometer Model with sense finger dynamics for mixed-texnology control loops. IEEE Behavioral Modeling and Simulation Conference (BMAS), sep. 2007, San Jose, California, USA. 143 – 147.
  • 27. Bourdopoulos G. I., Pnevmatikakis A., Anastassopoulos V. and Deliyannis T. L. 2003. Delta-Sigma Modulators: Modeling, Design and Applications. Imperial College Press, London, UK.
  • 28. Jespers P. A. G. 2001. Integrated Converters: D to A and A to D Architectures, Analysis and Simulation. Oxford University Press, Oxford, UK.
  • 29. Schreier R. and Temes G. C. 2005. Understanding Delta-Sigma Data Converters. John Wiley and Sons, Hoboken, NJ, USA.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-ec516505-9080-4475-9f5e-e1016943d884
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