Metrology and control of electromagnetically actuated cantilevers using optical beam deflection method

• Autorzy: Kopiec Daniel , Majstrzyk Wojciech , Pruchnik Bartosz , Gacka Ewelina , Badura Dominik , Sierakowski Andrzej , Janus Paweł , Gotszalk Teodor

Identyfikatory

DOI

10.24425/mms.2021.137698

• Języki publikacji: EN

Abstrakty

EN

In this paper, we present metrology and control methods and techniques for electromagnetically actuated microcantilevers. The electromagnetically actuated cantilevers belong to the micro electro mechanical systems (MEMS), which can be used in high resolution force and mass change investigations. In the described experiments, silicon cantilevers with an integrated Lorentz current loop were investigated. The electromagnetically actuated cantilevers were characterized using a modified optical beam deflection (OBD) system, whose architecture was optimized in order to increase its resolution. The sensitivity of the OBD system was calibrated using a reference cantilever, whose spring constant was determined through thermomechanical noise analysis registered interferometrically. The optimized and calibrated OBD system was used to observe the resonance and bidirectional static deflection of the electromagnetically deflected cantilevers. After theoretical analysis and further experiments, it was possible to obtain setup sensitivity equal to 5.28 mV/nm.

Słowa kluczowe

EN

optical beam deflection; thermomechanical noise; low frequency noise; electromagnetically actuated cantilever; Lorentz force

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2021
• Tom: Vol. 28, nr 4
• Strony: 627--642
• Opis fizyczny: Bibliogr. 32 poz., rys., tab., wykr., wzory

Twórcy

autor

Kopiec Daniel

• Wrocław University of Technology, Faculty of Microsystems Electronics and Photonics, Department of Nanometrology, Janiszewskiego 11/17, Wrocław 50-372, Poland

autor

Majstrzyk Wojciech

• Wrocław University of Technology, Faculty of Microsystems Electronics and Photonics, Department of Nanometrology, Janiszewskiego 11/17, Wrocław 50-372, Poland

autor

Pruchnik Bartosz

• Wrocław University of Technology, Faculty of Microsystems Electronics and Photonics, Department of Nanometrology, Janiszewskiego 11/17, Wrocław 50-372, Poland

autor

Gacka Ewelina

• Wrocław University of Technology, Faculty of Microsystems Electronics and Photonics, Department of Nanometrology, Janiszewskiego 11/17, Wrocław 50-372, Poland

autor

Badura Dominik

• Wrocław University of Technology, Faculty of Microsystems Electronics and Photonics, Department of Nanometrology, Janiszewskiego 11/17, Wrocław 50-372, Poland

autor

Sierakowski Andrzej

• Łukasiewicz Research Network, Institute of Microelectronics and Fotonics, Lotników 32/46, Warsaw 02-668, Poland

autor

Janus Paweł

• Łukasiewicz Research Network, Institute of Microelectronics and Fotonics, Lotników 32/46, Warsaw 02-668, Poland

autor

Gotszalk Teodor

• Wrocław University of Technology, Faculty of Microsystems Electronics and Photonics, Department of Nanometrology, Janiszewskiego 11/17, Wrocław 50-372, Poland

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Uwagi

1. This work was supported by the National Science Centre, Poland OPUS grant “Nanometrology of Nottingham cooling effect using operational microelectromechanical systems” (project No. 2020/37/B/ST7/03792).

2. Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2021).