The influence of metal impurities to a-C:H films

• Autorzy: Rutkuniene Z. , Grigonis A. , Vigricaite L.

Warianty tytułu

PL

Wpływ metalowych zanieczyszczeń do filmów a-C:H

• Języki publikacji: EN

Abstrakty

EN

The carbon coatings on the silicon substrate by chemical vapour phase precipitation as the insertion of platinum and copper impurities were observed in this paper. It was obtained that growing films are more polymeric like. The refractive index of all films are similar and varies from 1,6 to 1,75 and does not depend on nature of metal. Analysis of Raman spectra showed that typical for amorphous carbon G peaks become dominant and move to the lower means (from 1682 cm-¹ to approximately 1553 cm-1) and then metal impurities were introduced to the film. Also a new peak at about 1800 cm-¹ was obtained there. Typical D peak in films with platinum impurities is less intensive and disappears when Cu impurities are involved in film.

PL

Analizowano powłokę węglową na podłożu krzemowym poprzez chemiczne rozpuszczanie domieszek platyny i miedzi. Stwierdzono że współczynnik odbicia warstw był podobny dla wszystkich warstw i wynosił 1,6 do 1,75 niezależnie od domieszek. Spektralna analiza Ramanowska wykazała dominujące i zmniejszała się do ok 1553 cm-¹ przy wprowadzaniu domieszek

Słowa kluczowe

EN

amorphous carbon film; metal impurities; Raman spectroscopy; ellipsometry; IR spectroscopy

PL

powłoka węglowa; podłoże krzemowe; spektralna analiza Ramanowska; spektroskopia

• Wydawca: Wydawnictwo SIGMA-NOT
• Czasopismo: Przegląd Elektrotechniczny
• Rocznik: 2013
• Tom: R. 89, nr 3b
• Strony: 288--290
• Opis fizyczny: Bibliogr. 16 poz., il., tab., wykr.

Twórcy

autor

Rutkuniene Z.

• Physics Department, Kaunas University of Technology, Studentu 50, LT-51368, Kaunas Lithuania

autor

Grigonis A.

• hysics Department, Kaunas University of Technology, Studentu 50, LT-51368, Kaunas Lithuania

autor

Vigricaite L.

• hysics Department, Kaunas University of Technology, Studentu 50, LT-51368, Kaunas Lithuania

Bibliografia

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