A Review of the Automation of the Czochralski Crystal Growth Process

Winkler, J.; Neubert, M.; Rudolph, J.

Artykuł - szczegóły

Tytuł artykułu

A Review of the Automation of the Czochralski Crystal Growth Process

Autorzy

Winkler J. , Neubert M. , Rudolph J.

Identyfikatory

Warianty tytułu

Języki publikacji

Abstrakty

On the occasion of the centennial of the invention of the Czochralski crystal growth process by the Polish scientist Jan Czochralski, a review of selected strategies for the automatic control of this process is given. This review provides a sketch of the fundamental challenges of controlling the Czochralski process and the basic concepts of feedback control. Both early and modern approaches to the control of the Czochralski process are described. The discussion focuses on questions related to feed-forward control, feedback control, and state estimation. The presented methods rely on simple mathematical process models in contrast to the finite element model-based approaches typically used in crystal growth process design and analysis. Such mathematical models motivate both the structure and parameters of the chosen controller. A comprehensive list of references to background literature on this topic completes this survey.

Słowa kluczowe

crystal growth crystallization crystallography semiconductor growth Czochralski method

wzrost kryształu krystalizacja krystalografia wzrost półprzewodników metoda Czochralskiego

Wydawca

Oficyna Wydawnicza Politechniki Warszawskiej

Czasopismo

Zeszyty Historyczne Politechniki Warszawskiej

Rocznik

2014

Tom

z. 16

Strony

123--134

Opis fizyczny

Bibliogr. 103 poz., rys., wykr.

Twórcy

autor

Winkler J.

Jan.Winkler@tu-dresden.de

Institut für Regelungs- und Steuerungstheorie, Technische Universität Dresden, Germany

autor

Neubert M.

Leibniz-Institut für Kristallzüchtung, Berlin, Germany

autor

Rudolph J.

Lehrstuhl für Systemtheorie und Regelungstechnik, Universität des Saarlandes, Saarbrücken, Germany

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Uwagi

Artykuł przedrukowany z czasopisma "Acta Physica Polonica" A, 2013, Vol.124(2), pp.181-192

Typ dokumentu

Bibliografia

Identyfikator YADDA

bwmeta1.element.baztech-d75f48ad-be47-40f5-8308-ca6643b06933