Performance evaluation modeling a Microelectromechanical system based Finite Element piezoelectric Shear Actuated Beam

• Autorzy: Sarker M. R. , Mohamed A. , Mohamed R.

Warianty tytułu

PL

Modelowanie właściwości system MEMS na przykładzie siłownika piezoelektrycznego

• Języki publikacji: EN

Abstrakty

EN

This paper presents the modeling a Microelectromechanical systems (MEMS) based Piezoelectric shear actuated beam by using COMSOL Multiphysics software of version 4.3a. The overall dimensions model of the beam is of 0.1-m long, 0.03-m width and 0.018-m thickness. For this model the structural mechanics boundary conditions are of the cantilever beam is fixed at its surfaces at x = 0 and that all other surfaces are free. In this model applied, the different materials (i.e., Silicon, Titanium, Barium titanate, Lead zirconate titanate, Material) with voltages between the top and bottom surfaces of the piezoceramic domain (i.e., 15V, 35V) have been analyzed. Firstly, select the Structural Mechanics of the Piezoelectric Devices and analyzed changing the selecting physics. Secondly, defining the Geometry on deflection of sandwiched beam is setting the boundary condition and analyzed changing of the beam. Thirdly, the beam is composed of a 0.001-m thick flexible foam core sandwiched by two 0.002-m thick silicon and titanium layers. In the Fourth step, bend of beam is analyzed by changing both materials of sandwiched beam and mashing of the defection beam is display by changing both thickness and electric potential. Finally, the results of analysis allowed to conclude us to design a piezoelectric shear actuated beam with different ranges and resolutions, under the condition of changing both thickness and material of electrodes gives the optimum deflection of 0.0308-um and 0.0815-um under 15V input voltage with different materials.

PL

W artykule zaprezentowano metodę projektowania układów typu MEMS na przykładzie piezoelektrycznego siłownika. Dla siłownika zaproponowano model numeryczny oraz warunki brzegowe. Przedstawiono obliczenia dla różnych materiałów i różnych konstrukcji.

Słowa kluczowe

EN

materials; MEMS; cantilever

PL

MEMS; siłownik piezoelektryczny; model numeryczny; warunki brzegowe

• Wydawca: Wydawnictwo SIGMA-NOT
• Czasopismo: Przegląd Elektrotechniczny
• Rocznik: 2015
• Tom: R. 91, nr 3
• Strony: 5--8
• Opis fizyczny: Bibliogr. 13 poz., rys., tab.

Twórcy

autor

Sarker M. R.

• Department of Electrical, Electronic and Systems Engineering, Universiti Kebangsaan Malaysia (UKM)

autor

Mohamed A.

• Department of Electrical, Electronic and Systems Engineering, Universiti Kebangsaan Malaysia (UKM)

autor

Mohamed R.

• Department of Electrical, Electronic and Systems Engineering, Universiti Kebangsaan Malaysia (UKM)

Bibliografia

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