Wpływ tlenków itru i glinu jako dodatków do spiekania na ablację laserową azotku krzemu

• Autorzy: Cieśla Natalia , Rutkowski Paweł , Kata Dariusz , Zientara Dariusz , Ziąbka Magdalena

Warianty tytułu

EN

The influence of yttria and alumina sintering additives on silicon nitride laser ablation

• Języki publikacji: PL EN

Abstrakty

PL

Praca dotyczy badań nad laserową obróbką ubytkową w trybie pracy ciągłej materiału polikrystalicznego z azotku krzemu z dodatkiem 5% i 10% wagowych tlenków itru i tlenku. Materiały otrzymano metodą prasowania na gorąco w 1750 °C. Scharakteryzowano je pod kątem zagęszczenia, składu fazowego, mikrostruktury oraz właściwości cieplnych. Spieki wykazywały różny skład, stopień zagęszczenia, a co za tym idzie różną dyfuzyjność cieplną i przewodność. Polikryształy poddano obróbce laserowej przy użyciu lasera światłowodowego domieszkowanego iterbem o długości 1064 nm. Do obróbki wykorzystano 40-mikronową plankę wiązki, prędkość procesu 1 mm/s i moc 40 W. Badano szerokość i głębokość cięcia laserowego oraz strefę wpływu ciepła. Na podstawie charakterystyki materiału przeanalizowano wpływ dodatków tlenkowych poprawiających spiekanie na obróbkę laserową azotku krzemu.

EN

The work concerns research on continuous work laser subtractive processing of silicon nitride polycrystalline material with 5% and 10% by weight of yttria and alumina additions. The materials were obtained by hot-pressing method at 1750 °C. They were characterized in terms of densification, phase composition, microstructure, and thermal properties. The sinters showed various composition, degree of densification and resulting it different thermal diffusivity and conductivity. The polycrystals were laser treated using a 1064 nm ytterbium doped fibre laser. The 40 microns beam spot, 1 mm/s process speed and a power of 40 W were used for processing purposes. The width and depth of the laser cutting as well as heat influenced zone were investigated. The influence of oxides sintering additives on the laser processing of silicon nitride was analysed basing on the material characterization.

Słowa kluczowe

PL

obróbka laserowa; laser światłowodowy; azotek krzemu; środki ułatwiające spiekanie; właściwości cieplne

EN

laser processing; fibre laser; silicon nitride; sintering aids; thermal properties

• Wydawca: Polskie Towarzystwo Ceramiczne
• Czasopismo: Materiały Ceramiczne
• Rocznik: 2021
• Tom: T. 73, nr 2
• Strony: 71--81
• Opis fizyczny: Bibliogr. 28 poz., rys., tab.

Twórcy

autor

Cieśla Natalia

• AGH University of Science and Technology in Kraków, Faculty of Materials Science and Ceramics, al. A. Mickiewicza 30, 30-059 Kraków, Poland

autor

Rutkowski Paweł

• AGH University of Science and Technology in Kraków, Faculty of Materials Science and Ceramics, al. A. Mickiewicza 30, 30-059 Kraków, Poland

autor

Kata Dariusz

• AGH University of Science and Technology in Kraków, Faculty of Materials Science and Ceramics, al. A. Mickiewicza 30, 30-059 Kraków, Poland

autor

Zientara Dariusz

• AGH University of Science and Technology in Kraków, Faculty of Materials Science and Ceramics, al. A. Mickiewicza 30, 30-059 Kraków, Poland

autor

Ziąbka Magdalena

• AGH University of Science and Technology in Kraków, Faculty of Materials Science and Ceramics, al. A. Mickiewicza 30, 30-059 Kraków, Poland

Bibliografia

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• [2] Xu, W., Yin, Z., Yuan, J., Wang, Z., Fang, Y.: Effects of sintering additives on mechanical properties and microstructure of Si3N4 ceramics by microwave sintering, Mater. Sci. Eng. A, 684, (2017), 127-134.
• [3] Kašiarová, M., Tatarko, P., Burik, P., Dusza, J., Šajgalík, P.: Thermal shock resistance of Si3N4 and Si3N4–SiC ceramics with rare-earth oxide sintering additives, J. Eur. Ceram. Soc., 34, (2014), 3301-3308.
• [4] Tatarko, P., Kašiarová, M., Dusza, J., Šajgalík, P.: Influence of rare-earth oxide additives on the oxidation resistance of Si3N4–SiC nanocomposites, J. Eur. Ceram. Soc., 33, (2013), 2259-2268.
• [5] Hyuga, H., Jones, M. I., Hirao, K., Yamauchi, Y.: Influence of Rare‐Earth Additives on Wear Properties of Hot‐Pressed Silicon Nitride Ceramics under Dry Sliding Conditions, J. Eur. Ceram. Soc., 87, (2004), 1683-1686.
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• [12] Wang, L., Huang, C. Z., Wang, J., Zhu, H. T., Yao, P.: Laser-Assisted Waterjet Microgrooving of Silicon Nitride Ceramics with near Damage-Free, Mater. Sci. Forum, 861, (2016), 69-74,.
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• [15] Azarhoushang, B., Soltani, B., Daneshi, A.: Study of the effects of laser micro structuring on grinding of silicon nitride ceramics, CIRP Annals – Manufact. Technol., 67, (2018), 329-332.
• [16] Bonse, J., Mann, G., Krüger, J., Marcinkowski, M., Eberstein, M.: Femtosecond laser-induced removal of silicon nitride layers from doped and textured silicon wafers used in photovoltaics, Thin Solid Films, 542, (2013), 420-425.
• [17] Golla, B. R., Koa, J. W., Kim, J. M., Kim, H. D.: Effect of particle size and oxygen content of Si on processing, microstructure and thermal conductivity of sintered reaction bonded Si3N4, J. Alloys Compd., 595, (2014), 60-66.
• [18] Han, L., Li, F., Huang, L., Zhang, H., Pei, Y., Dong, L., Zhang, J., Zhang, S.: Preparation of Si3N4 porous ceramics via foam-gel casting and microwave-nitridation method, Ceram. Int., 44, (2018), 17675-17680.
• [19] Liang, H., Zeng, Y., Zuo, K., Xia, Y., Yao, D., Yin, J.: Mechanical properties and thermal conductivity of Si3N4 ceramics with YF3 and MgO as sintering additives, Ceram. Int., 42, (2016), 15679-15686.
• [20] Watari, K., Hirao, K., Brito, M. E., Toriyama, M., Ishizaki, K.: Factors to Enhance Thermal Conductivity of Si3N4 Ceramics (Review), AZo J. Mater. Online, 2, (2006).
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• [22] Kim, J.-M., Ko, S.-I., Kim, H.-N., Ko, J.-W., Lee, J.-W., Kim, H.-D., Park, Y.-J.: Effects of microstructure and intergranular glassy phases on thermal conductivity of silicon nitride, Ceram. Int., 43, (2017), 5441-5449.
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• [24] Wang, L., Huang, C., Wang, J., Zhu, H., Liang, X.: An experimental investigation on laser assisted waterjet micro-milling of silicon nitride ceramics, Ceram. Int., 44, (2018), 5636-5645.
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• [27] Woo, W.-S., Lee, Ch.-M.: A study on the edge chipping according to spindle speed and inclination angle of workpiece in laser-assisted milling of silicon nitride, Opt. Laser Techn., 99, (2018), 351-362.
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Uwagi

PL