Decoupled Mems vibrating gyroscope simulations based on finite element method

• Autorzy: Nazdrowicz Jacek
• Języki publikacji: EN

Abstrakty

EN

In this paper the analysis of a MEMS vibrating gyroscope model is presented. The FEM analysis of the 3D structure has been performed in COMSOL Multiphysics software. Author took particular attention on mechanical properties particular parts of this device especially combs (used in electrostatical actuators and sensors) in drive and sense directions. For further electrostatic analysis (which is not covered in this article) this analysis has enormous meaning because any deformation of comb structure during operation influences on quality of electrostatic actuating and sensing. In this paper author performed stress results and deformation analysis in sense direction, however similar conclusions one can be drawn for drive direction.

Słowa kluczowe

EN

gyroscope; comb structure; MEMS; Finite Element Method

PL

giroskop; MEMS; metoda elementów skończonych

• Wydawca: Lodz University of Technology. Department of Microelectronics and Computer Science
• Czasopismo: International Journal of Microelectronics and Computer Science
• Rocznik: 2018
• Tom: Vol. 9, nr 2
• Strony: 66--71
• Opis fizyczny: Bibliogr. 10 poz.

Twórcy

autor

Nazdrowicz Jacek

• Department of Microelectronics and Computer Science, Lodz University of Technology, Lodz, Poland

Bibliografia

• [1] https://technology.ihs.com/572622/mems-market-tracker-h1-2016.
• [2] M. Mehregany and S. Roy, Introduction to MEMS, Microengineering Aerospace Systems, Ed: H. Helvajian, Aerospace Press, Los Angeles, CA, USA, 1999.
• [3] N. Yazdi et al., Micromachined inertial sensors, Proceedings of the IEEE, vol. 86, pp. 1640-1659, 1998.
• [4] N. Maluf, K. Williams, An Introduction to MicroElectromechanical Systems Engineering, 2th ed Artech House Inc., pp. 79-131, 2004.
• [5] S. E. Lyshveski, MEMS and NEMS: Systems, Devices and Structures, CRC Press, pp. 109-136, 2002.
• [6] T. Smith, A 15b Electromechanical Sigma-Delta Converter for Acceleration Measurements, in Proc. of IEEE Int. Solid-State Circuits Conf. Digest of Technical Papers, pp. 160-161, San Francisco, CA, 1994.
• [7] A. Lawrence, Modern Inertial Technology: Navigation, Guidance and Control, .Springer Verlag, New York,1993.
• [8] V. Kempe, Inertial MEMS: Principles and Practice, Cambridge University Press, pp. 227-282, 2011.
• [9] G. Zhang, Sensing and Control Electronics for Low-Mass Low-Capacitance MEMS Accelerometer, Ph.D. Dissertation, Carnegie Mellon University, 2002, https://www.ece.cmu.edu/~mems/pubs/ pdfs/ece/phd_thesis/0201_wu-2002.pdf.
• [10] L. Zimmermann, J. Ebersohl, F. Le Hung, J. P. Berry, F. Baillieu, P. Rey, B. Diem, S. Renard, P. Caillat, Airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability. Sensors and Actuators, pp. 190-195, 1995.

Uwagi

Opracowanie rekordu w ramach umowy 509/P-DUN/2018 ze środków MNiSW przeznaczonych na działalność upowszechniającą naukę (2019).