Applications of the LTCC ceramics in microplasma systems

• Autorzy: Macioszczyk Jan , Golonka Leszek

Identyfikatory

DOI

10.24425/mms.2019.130564

• Języki publikacji: EN

Abstrakty

EN

In this paper the current status of microplasma devices and systems made in the LTCC technology is presented. The microplasma characteristics and applications are described. We discuss the properties of the LTCC materials, that are necessary for reliable operation of the sources. This material is well known for its good reliability and durability in harsh conditions. Still, only a few examples of such microplasma sources are described. Some of them have been developed by the authors and successfully used for chemical analysis and synthesis.

Słowa kluczowe

EN

microplasma; Low-Temperature Co-fired Ceramics; microsystems

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2019
• Tom: Vol. 26, nr 4
• Strony: 713--724
• Opis fizyczny: Bibliogr. 43 poz., fot., rys., tab.

Twórcy

autor

Macioszczyk Jan

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland

autor

Golonka Leszek

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland

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Uwagi

EN

The authors wish to thank National Science Centre (grant no. 2016/21/N/ST7/01618) for the financial support.