Verilog – ams model of comb-drive sensing element of integrated capacitive microaccelerometer for behavioral level of computer aid design

• Autorzy: Holovatyy A. , Teslyuk V. , Lobur M.
• Języki publikacji: EN

Abstrakty

EN

The article presents Verilog – AMS model of the comb-drive sensing element of the integrated capacitive microaccelerometer. The suggested model allows to simulate the reaction of the sensing element effected by the applied force of acceleration, changes of its comb-drive capacities, output voltages and currents for determining its constructive parameters and for analysis of the mechanical module of the integrated device at the behavioral level of computer-aided design.

Słowa kluczowe

EN

micro-electro-mechanical systems; MEMS; micromachining technologies; micromechanical comb-drive sensing element; integrated capacitive microaccelerometer; acceleration; SMASH; Verilog-AMS hardware description language; computer-aided design

• Wydawca: Polish Academy of Sciences, Branch in Lublin
• Czasopismo: ECONTECHMOD : An International Quarterly Journal on Economics of Technology and Modelling Processes
• Rocznik: 2014
• Tom: Vol. 3, No 4
• Strony: 49--53
• Opis fizyczny: Bibliogr. 28 poz., rys., wykr., wz.

Twórcy

autor

Holovatyy A.

• Ternopil Ivan Pul’uj National Technical University,Department of software engineering

autor

Teslyuk V.

• Lviv Polytechnic National University, Department of computer aided design

autor

Lobur M.

• Lviv Polytechnic National University, Department of computer aided design

Bibliografia

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