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Automation of determining the range of values for MEMS resistive parameters

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Języki publikacji
EN
Abstrakty
EN
This paper is devoted to the development of automating methods of the ranges determination process of the resistance values measurements for the investigated MEMS resistive parameters (strain gauges, piezoresistors, thermistors, magnetoresistors and photoresistors, etc.), electric resistance of which is changing during functioning of MEMS, in order to improve the accuracy of investigated resistive parameter value determining and optimization of the entire measuring process in general. The developed method for automation of values range determination of the MEMS resistive parameters measurand is based on the designed models and algorithm of automation for the process of an exemplary resistor value determination. A measurand of the investigated MEMS resistive parameter is located in a neighborhood of this exemplary resistor value. The abovementioned method is also based on the developed model and algorithm for automation of the values range determination of the MEMS resistive parameters measurand.
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Twórcy
autor
  • Lviv Polytechnic National University
  • Vasyl Stefanyk Precarpathian National University
autor
  • Lviv Polytechnic National University
  • Lviv Polytechnic National University
Bibliografia
  • 1. Napieralski A., Napieralska M., Szermer M., Maj C. 2012. The evolution of MEMS and modeling methodologies, COMPEL: The International Journal for computation and Mathematics in Electrical and Electronic Engineering, vol.31, Рp.1458–1469.
  • 2. Teslyuk V., Pereyma M., Denysyuk P., Chimich I. 2006. Computer-aided system for MEMS design “ProMIP” // Proc. of the 2nd Inter. Conf. of Young Scientists “Perspective Technologies and Methods in MEMS Design”. Lviv–Polyana, Ukraine, Рp.49-52.
  • 3. Minhang B. 2005. Analysis and Design Principles of MEMS Devices, 1st edition: Elsevier Science, р.328.
  • 4. James J. A. 2005. Micro Electro Mechanical System Design, 1st edition: CRC Press, p.496.
  • 5. Marc J. M. 2002. Fundamentals of Microfabrication: The Science of Miniaturization, 2nd edition: CRC Press, p.752.
  • 6. Matviykiv O. M. 2015. Mesoscale Modeling of Complex Microfluidic Flows. ECONTECHMOD. An international quarterly journal, Vol. 4, No. 1, Рp.77–85.
  • 7. Pohodylo E. V., Khoma V. V. 2011. CLR measuring instruments based on immitance-voltage conversion: monograph. Lviv: Lviv Polytechnic University Press, p.292. (in Ukrainian).
  • 8. Batavin V. V., Kontsevoi Y. A., Fedorovich Y. V. 1985. Measuring of parameters of semiconductor materials and structures. Moscow. Radio and communication, p.264. (in Russian).
  • 9. Lucyk J. Т., Huk О. P., Lah О. І., Stadnyk B. І. 2006. Temperature measurement: Theory and Practice. Lviv: Beskid–Bit, p. 580. (in Ukrainian).
  • 10. Dorozhovetz M., Warsza Z. L. 2007. Proposals for the extension methods of determining the uncertainty of measurements by GUM guide. PAR No. 1. Рp.16–25 (In Polish).
  • 11. Zaharov I. P., Kukush V. D. 2002. Theory of uncertainty in measurement. Study Guide. Kharkov: Konsum, p.256. (in Russian).
  • 12. JCGM 100:2008. Evaluation of measurement data. Guide to the expression of uncertainty in measurement.
  • 13. Dorogovec М. 2007. Processing ofmeasu-rement results.Study Guide Lviv: Edition of Lviv politechnic, p.624. (in Ukrainian).
  • 14. Zięba A., Ramza P. 2011. Standard deviation of the mean of auto correlated observations estimated with the use of the autocorrelation function estimated from the data. Metrology & MeasurementSystems, 18, Рp.529-534. (in Polish).
  • 15. Bate A. 2002. Modern impedance measurement techniques. Electronics World, December, p. 12–18.
  • 16. Diaz M. 2010. Petri Nets: Fundamental Models, Verification and Applications, John Wiley & Sons, p.768.
  • 17. Teslyuk V., Tarik Al Omari, Hamza Alshavabkekh, Denysyuk P., Melnyk M. 2007. Computer-Aided Design of MEMS at system level, Machine Dynamics Problems, Vol.31, p.92-104.
  • 18. James L., Peterson A. 1980. Note on Colored Petri Nets, Information Processing Letters, Vol. 11, Nr 1, Рp.40-43.
  • 19. Kurt J., Lars M. K. 2009. Coloured Petri Nets: modelling and validation of concurrent systems: 1st edition. Springer, p.395.
  • 20. Shestakevych T., Pasichnyk V. 2015. The use of Petri Nets for inclusive education IT-support. ECONTECHMOD. An international quarterly journal – 2015, Vol. 04, No. 2, Рp.33–38.
Uwagi
PL
Opracowanie ze środków MNiSW w ramach umowy 812/P-DUN/2016 na działalność upowszechniającą naukę
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-c1ba93dc-8317-4c85-a2b8-85b04000df23
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