Study of a MEMS hybrid thermo-PZT micro actuator

• Autorzy: Pourrostami H. , Viliani N. S. K.

Identyfikatory

DOI

10.15632/jtam-pl.54.4.1309

• Języki publikacji: EN

Abstrakty

EN

The current study presents an analytical model for a MEMS cantilever based hybrid thermo- -piezoelectric micro actuator. The micro actuator structure consists of a unimorph type bending piezoelectric beam and a passive layer which uses the thermal bimorph principle. Primarily, under electrical and thermal loadings, the governing equations of motion are derived. After verification of the results, the deflection analysis of the micro actuator is performed. Moreover, the equivalent force at the actuator tip is obtained. To provide efficient optimization, the effects of the micro actuator geometrical and materials properties on the actuator tip deflection and force are investigated.

Słowa kluczowe

EN

hybrid micro actuator; thermo-piezoelectric; deflection; force analysis

• Wydawca: Polskie Towarzystwo Mechaniki Teoretycznej i Stosowanej
• Czasopismo: Journal of Theoretical and Applied Mechanics
• Rocznik: 2016
• Tom: Vol. 54 nr 4
• Strony: 1309--1318
• Opis fizyczny: Bibliogr. 16 poz., rys., tab.

Twórcy

autor

Pourrostami H.

• Department of Mechanical Engineering, Islamic Azad University, Abhar Branch, I.R. Iran

autor

Viliani N. S. K.

• Department of Mechanical Engineering, Islamic Azad University, Abhar Branch, I.R. Iran

Bibliografia

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• 2. Ballas R., 2007, Piezoelectric Multilayer Beam Bending Actuators, Static and Dynamic Behavior and Aspects of Sensor Integration, Springer, 1st Edit., ISBN: 978-3-540-32641-0
• 3. Capparelli D.J., Frecker M.I., Simpson T.W., Snyder A., 2002, Design of a PZT bimorph actuator using a metamodel-based approach, ASME Journal of Mechanical Design, 124, 354-357
• 4. De Cicco G., Morten B,, 2009, Thick-film piezoelectric actuators for micro positioning, Journal of Intelligent Material Systems and Structures, 20, 1689-1697
• 5. Devoe D., Pisano P., 1997, Modeling and optimal design of piezoelectric cantilever microactuator, Journal of Microelectromechanical Systems, 6, 3, 266-270
• 6. Ha S., Kim Y., 2002, Analysis of a piezoelectric multi-morph in extensional and flexural motions, Journal of Sound and Vibration, 253, 5, 1001-1014
• 7. Hooker M.W., 1998, Properties of PZT-Based Piezoelectric Ceramics Between −150 and 250◦C, Lockheed Martin Engineering & Science Co., Hampton, Virginia
• 8. Jain A., Qu H., Todd S., Xie H., 2005, A thermal bimorph micromirror with large bi-directional and vertical actuation, Sensors and Actuators A: Physical, 122, 9-15
• 9. Kargarnovin M.H., Najafizadeh M.M., Viliani N.S., 2007, Vibration control of a functionally graded material plate patched with piezoelectric actuators and sensors under a constant electric charge, Smart Materials and Structures, 16, 1252-1259
• 10. Nguyen N.T., Ho S., 2004, A polymeric microgripper with integrated thermal actuators, Journal of Micromechanics and Microengineering, 14, 969-974
• 11. Pourrostami H., Kargarnovin M.H., Zohoor H., 2012, Modeling and analytical solution of hybrid thermopiezoelectric micro actuator and performance study under changing of different parameters, Mechanics of Advanced Material and Structure, 22, 10, 785-793
• 12. Rakotondrabe M., Diouf M., Lutz P., 2008, Robust feed forward-feedback control of a hysteretic piezocantilever under thermal disturbance, IFAC World Congress, Seoul Corea, July 2008, 13725-13730
• 13. Rakotondrabe M., Ivan I., 2010, Development and dynamic modeling of a new hybrid thermopiezoelectric microactuator, IEEE Transactions on Robotics, 26, 1077-1085
• 14. Roberts D.C., Li H., 2003, A piezoelectric microvalve for compact high frequency high-differential pressure hydraulic micropumping systems, Journal of Microelectromechanical Systems, 12, 81-92
• 15. Tadmor E., Kósa G., 2003, Electromechanical coupling correction for piezoelectric layered beams, Journal of Microelectromechanical Systems, 12, 899-906
• 16. Zheng L., Lu M., 2004, A large-displacement CMOS micromachined thermal actuator with comb electrodes for capacitive sensing, Sensors and Actuators A: Physical, 136, 2, 697-703

Uwagi

PL

Opracowanie ze środków MNiSW w ramach umowy 812/P-DUN/2016 na działalność upowszechniajacą naukę.