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Capacitive MEMS accelerometer with apen-loop switched-capacitor readout circuit

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Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
MEMS are one of the fastest developing branch in microelectronics. Many integrated sensors are widely used in smart devices i.e. smartphones, and specialized systems like medical equipment. In the paper we present the main parts of a system for measuring human movement which can be used in human balance disorder diagnosis. We describe our design of capacitive accelerometers and dedicated switched capacitor readout circuit. Both will be manufactured as separate chips in different technological processes. The principle of operation, schematics and layouts of all parts of the system are presented. Preliminary simulations show that the proposed designs are applicable for the considered medical device.
Rocznik
Strony
142--148
Opis fizyczny
Bibliogr. 60 poz., il. kolor., rys., wykr.
Twórcy
  • Department of Microelectronics and Computer Science, Lodz University of Technology, Łódź, Poland
  • Department of Microelectronics and Computer Science, Lodz University of Technology, Łódź, Poland
autor
  • Department of Microelectronics and Computer Science, Lodz University of Technology, Łódź, Poland
autor
  • Department of Microelectronics and Computer Science, Lodz University of Technology, Łódź, Poland
  • Department of Microelectronics and Computer Science, Lodz University of Technology, Łódź, Poland
Bibliografia
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Uwagi
Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2020).
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-bb323114-2705-48d6-a068-ecc97d9da136
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