Magnetron sputtered silicon thin films for solar cell applications

• Autorzy: Szindler Marek , Szindler Magdalena M. , Lukaszkowicz Krzysztof , Matus Krzysztof , Nuckowski Paweł

Identyfikatory

DOI

10.24425/opelre.2024.151992

• Języki publikacji: EN

Abstrakty

EN

One of the important directions of research in photovoltaics is the development of new thin-film technology, which can replace the currently used, more expensive bulk silicon technology. The article discusses the findings from research focused on optimizing the parameters for the deposition of silicon thin films with P-type electrical conductivity for applications in photovoltaics. The growth rate was determined depending on the change in substrate temperature using reflectometry and the influence of deposition time on optical properties was determined using UV/VIS spectroscopy. Photovoltaic structures were made on substrates with an ITO layer and their electrical parameters were measured. The authors applied the magnetron sputtering method to deposit the layers, selecting it over the commercially used the chemical vapor deposition (CVD) method. This replacement could alleviate the necessity for high temperatures and broaden the potential applications of thin-film solar cells.

Słowa kluczowe

EN

surface engineering; thin films; magnetron sputtering; silicon; solar cells

• Wydawca: Stowarzyszenie Elektryków Polskich ; Polska Akademia Nauk ; Wojskowa Akademia Techniczna im. Jarosława Dąbrowskiego
• Czasopismo: Opto-Electronics Review
• Rocznik: 2024
• Tom: Vol. 32, No. 4
• Strony: art. no. e151992
• Opis fizyczny: Bibliogr. 16 poz., rys., wykr.

Twórcy

autor

Szindler Marek

• Scientific and Didactic Laboratory of Nanotechnology and Material Technologies, Faculty of Mechanical Engineering, Silesian University of Technology, ul. Towarowa 7, 44-100 Gliwice, Poland

• https://orcid.org/0000-0001-9938-4646

autor

Szindler Magdalena M.

• Department of Engineering Materials and Biomaterials, Silesian University of Technology, ul. Konarskiego 18a, 44-100 Gliwice, Poland

• https://orcid.org/0000-0001-8125-6435

autor

Lukaszkowicz Krzysztof

• Department of Engineering Materials and Biomaterials, Silesian University of Technology, ul. Konarskiego 18a, 44-100 Gliwice, Poland

• https://orcid.org/0000-0003-1511-9066

autor

Matus Krzysztof

• Materials Research Laboratory, Silesian University of Technology, ul. Konarskiego 18a, 44-100 Gliwice, Poland

• https://orcid.org/0000-0002-4015-5600

autor

Nuckowski Paweł

• Materials Research Laboratory, Silesian University of Technology, ul. Konarskiego 18a, 44-100 Gliwice, Poland

• https://orcid.org/0000-0002-2606-0525

Bibliografia

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