Structural and optical properties of aluminium nitride thin films fabricated using pulsed laser deposition and dc magnetron sputtering on various substrates

• Autorzy: Virt Ihor , Potera Piotr , Wisz Grzegorz , Dziedzic Andrzej , Cieniek Bogumił , Lopatynskyi Ivan , Frugynskyi Marian

Identyfikatory

DOI

10.2478/adms-2024-0001

• Języki publikacji: EN

Abstrakty

EN

Aluminium nitride thin films were fabricated using pulsed laser deposition and DC magnetron sputtering. Different technological parameters and the effects of different substrates on the optical and structural parameters of AlN samples were studied. An X-ray diffraction study was performed for the layer deposited on the Si3N4 substrate. A high-energy electron diffraction study was also carried out for the layer deposited on a KCl substrate. Transmission spectra of layers on quartz, sapphire, and glass substrates were obtained. An evaluation of the optical band gap of the obtained layers was carried out (Eg form 3.81 to 5.81 eV) and the refractive index was calculated (2.58). The relative density of the film (N1TN-AlN sample) is 1.26 and was calculated using the Lorentz-Lorentz relationship. Layers of aluminium nitride show an amorphous character with a polycrystalline region. It was shown that the properties of AlN films strongly depend on the method, growth conditions, and substrate used.

Słowa kluczowe

EN

thin solid films; AlN; optical properties; structural properties; pulsed laser deposition; PLD; DC magnetron sputtering

PL

cienkie warstwy; AlN; właściwości optyczne; właściwości strukturalne; PLD; rozpylanie magnetronowe

• Wydawca: Politechnika Gdańska
• Czasopismo: Advances in Materials Science
• Rocznik: 2024
• Tom: Vol. 24, nr 1(79)
• Strony: 5--16
• Opis fizyczny: Bibliogr. 54 poz., rys., tab., wykr.

Twórcy

autor

Virt Ihor

• Drohobych State Pedagogical University, Drohobych, Ukraine

autor

Potera Piotr

• Institute of Materials Engineering, College of Natural Sciences, University of Rzeszow, Poland

autor

Wisz Grzegorz

• Institute of Materials Engineering, College of Natural Sciences, University of Rzeszow, Poland

autor

Dziedzic Andrzej

• Institute of Physics, College of Natural Sciences, University of Rzeszow, Poland

autor

Cieniek Bogumił

• Institute of Materials Engineering, College of Natural Sciences, University of Rzeszow, Poland

autor

Lopatynskyi Ivan

• Lviv Polytechnic National University, Lviv, Ukraine

autor

Frugynskyi Marian

• Lviv Polytechnic National University, Lviv, Ukraine

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Uwagi

Opracowanie rekordu ze środków MNiSW, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2024).