A global model for the inductively coupled rf discharges in Ar/H2 mixture

• Autorzy: Tebani Hocine , Benyoucef Djilali

Identyfikatory

DOI

10.15199/48.2021.01.06

Warianty tytułu

PL

Model indukcyjnie sprzężonego wyładowania rf w mieszaninie ASr/H2

• Języki publikacji: EN

Abstrakty

EN

This paper presents the simulation of the rf Inductively Coupled Plasma (ICP) characteristics in the Ar/H2 mixture at low pressure, within a cylindrical stainless steel chamber. The global model used in this study and implemented on the COMSOL Multiphysics software, is elaborated under four main components: The fluid model for plasma species is associated with the electromagnetic equations for the calculation of the electric field using the magnetic vector potential. Moreover, since the plasma is weakly ionized, the properties of the neutral gas species must be taken into account by using the Navier-Stokes equation to describe the gas flow and the heat transfer equation to calculate the gas heating due to elastic collisions between electrons and neutrals. In this work, the model is first applied in order to understand the physical and chemical processes in the Ar/H2 plasmas. The properties of plasma species in the mixture are second investigated as a function of hydrogen fraction assuming the Maxwellian electron energy distribution. The theoretical interpretations of the obtained results are also addressed in this paper.

PL

W artykule przedstawiono symulację właściwości rf plazmy sprzężonej indukcyjnie (ICP) w mieszaninie Ar / H2 pod niskim ciśnieniem, w cylindrycznej komorze ze stali nierdzewnej. Model globalny zastosowany w tym badaniu i wdrożony w oprogramowaniu COMSOL Multiphysics jest opracowany w ramach czterech głównych komponentów: Model płynu dla form plazmy jest powiązany z równaniami elektromagnetycznymi służącymi do obliczania pola elektrycznego z wykorzystaniem potencjału wektora magnetycznego. Ponadto, ponieważ plazma jest słabo zjonizowana, należy wziąć pod uwagę właściwości obojętnych form gazu, stosując równanie Naviera-Stokesa do opisu przepływu gazu oraz równanie przenoszenia ciepła, aby obliczyć nagrzewanie gazu w wyniku zderzeń sprężystych między elektronami. W tej pracy model został po raz pierwszy zastosowany w celu zrozumienia procesów fizycznych i chemicznych zachodzących w plazmie ArH2.

Słowa kluczowe

EN

inductively coupled plasma; hydrogen; argon; gas temperature; gas follow; magnetic potential; fluid model

PL

plazma sprzężona indukcyjnie; wodór; argon; temperatura gazu; śledzenie gazu; potencjał magnetyczny; model płynu

• Wydawca: Wydawnictwo SIGMA-NOT
• Czasopismo: Przegląd Elektrotechniczny
• Rocznik: 2021
• Tom: R. 97, nr 1
• Strony: 30--36
• Opis fizyczny: Bibliogr., 41 poz., rys., tab.

Twórcy

autor

Tebani Hocine

• Hassiba Benbouali University of Chlef, Algeria

autor

Benyoucef Djilali

• Hassiba Benbouali University of Chlef, Algeria

Bibliografia

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Uwagi

Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2021).