Antireflective bilayer coatings based on Al2O3 film for UV region

• Autorzy: Marszałek K. , Winkowski P. , Marszałek M.

Identyfikatory

DOI

10.1515/msp-2015-0011

• Języki publikacji: EN

Abstrakty

EN

Bilayer antireflective coatings consisting of aluminium oxide Al₂O₃/MgF₂ and Al₂O₃/SiO₂ are presented in this paper. Oxide films were deposited by means of e-gun evaporation in vacuum of 5 × 10^-3 Pa in the presence of oxygen, and magnesium fluoride was prepared by thermal evaporation on heated optical lenses made from quartz glass (Corning HPFS). Substrate temperature was maintained at 250 C during the deposition. Thickness and deposition rate were controlled with a thickness measuring system Inficon XTC/2. The experimental results of the optical measurements carried out during and after the deposition process have been presented. Physical thickness measurements were made during the deposition process and resulted in 44 nm/52 nm for Al₂O₃/MgF₂ and 44 nm/50 nm for Al₂O₃/SiO₂ system. Optimization was carried out for ultraviolet region with minimum of reflectance at 300 nm. The influence of post deposition annealing on the crystal structure was determined by X-ray measurements. In the range from ultraviolet to the beginning of visible region, the reflectance of both systems decreased and reached minimum at 290 nm. The value of reflectance at this point, for the coating Al₂O₃/MgF₂ was equal to R290nm = 0.6 % and for Al₂O₃/SiO₂ R290nm = 1.1 %. Despite the difference between these values both are sufficient for applications in the UV optical systems for medicine and UV laser technology.

Słowa kluczowe

EN

Al2O3-MgF2; Al2O3-SiO2; antireflective coatings; optical properties

• Wydawca: De Gruyter
• Czasopismo: Materials Science Poland
• Rocznik: 2015
• Tom: Vol. 33, No. 1
• Strony: 6--10
• Opis fizyczny: Bibliogr. 23 poz., rys.

Twórcy

autor

Marszałek K.

• AGH – University of Science and Technology, al. Mickiewicza 30, 30-059 Krakow, Poland

autor

Winkowski P.

• PEVIN, ul. Piaskowa 55, 31-341 Krakow, Poland

autor

Marszałek M.

• The Henryk Niewodniczanski Institute of Nuclear Physics PAN, ul. Radzikowskiego 152, 31-342 Krakow, Poland

Bibliografia

• [1] STAPIŃSKI T., MARSZAŁEK K., LIPIŃSKI M., PANEK P., SZCZEPANIK W., Investigations of solar panel with anhanced transmission glass, in: Suszynski Z. (Ed.), Microelectronic materials and technologies, WUPK, Koszalin, 2012, p. 285.
• [2] LEE H.M., SAHOO K.C., LI Y.W., WU J.C, CHANG E.Y., Thin Solid Films, 518 (2010), 7204.
• [3] CITEK K., Optometry, 79 (2008), 143.
• [4] YOLDAS B.E., PARTLOW D.P., Appl. Optics, 23 (1984), 1418.
• [5] BAEUMER S., Handbook of plastic optics,Willey-VCH, Berlin, 2005, p. 139.
• [6] KAISER N., UHLIG H., SCHALLENBERG U., ANTON B., KAISER U., MANN K., EVA E., Thin Solid Films, 260 (1995), 86.
• [7] SELHOFER H., MUELLER R., Thin Solid Films, 351 (1999), 180.
• [8] LOSURDO M., GIANGREGORIO M.M., CAPEZZUTO P., BRUNO G., TORO R.G., MALANDRINO G., FRAGAL` A I.L., ARMELAO L., BARRECA D., TONDELLO E., SUVOROVA A.A., YANG D., IRENE E.A., Adv. Funct. Mater., 17 (17) (2007), 3607.
• [9] WINKOWSKI P., MARSZAŁEK K.W., Proc. SPIE., 8902 (2014), 890228-1 890228-5.
• [10] KOC K., TEPEHAN F.Z., TEPEHAN G.G., J. Mater. Sci., 40 (6) (2005), 1363.
• [11] IZAWA T., Proc. SPIE, 1441 (1990), 339.
• [12] RAINER F., LOWDERMILK W.H., MILAM D., CARNIGLIA C.K., HART T.T., LICHTENSTEIN T.L., Appl. Optics, 24 (1985), 496.
• [13] SMITH D., BAUMEISTER P., Appl. Optics, 18 (1979), 111.
• [14] KUMAR P., WIEDMANN M.K., WINTER C.H., AVRUTSKY I., Appl. Optics, 48 (28) (2009), 5407.
• [15] CRAWFORD L.J., EDMONDS N.R., Thin Solid Films, 515 (2006), 907.
• [16] LIOU Y.Y., Jpn. J. Appl. Phys., 43 (2004), 4185.
• [17] WANG H.L., LIN C.H., HON M.H., Thin Solid Films, 310 (1997), 260.
• [18] GREY D.E., (ED.), American Institute of Physics Handbook, Mc Graw-Hill, New York, 1982.
• [19] WEAST R.C., CRC Handbook of Chemistry and Physics, CRC Press, Inc., USA, 1983, p. 84.
• [20] THIELSCH R., GATTO A., HEBER J., KAISER N., Thin Solid Films, 410 (2002), 86.
• [21] SCHNEIDER J.M., ANDERS A., HJ¨ORVARSSON B., PETROV I., MACAK K., HELMERSSON U., SUNDGREN J.E., Appl. Phys. Lett., 74 (1999), 200.
• [22] CARMONA-TELLEZ S., GUZMAN-MENDOZA J., AGUILAR-FRUTIS M., ALARCON-FLORES G., GARCIA-HIPOLITO M., CANSECO M.A., FALCONY C., J. Appl. Phys., 103 (3) (2008), 034105.
• [23] MARSZAŁEK K., WINKOWSKI P., JAGLARZ J., Mater. Sci.-Poland, 32 (1) (2014), 80.