Problemy dynamiki strukturalnej mikroukładów

• Autorzy: Uhl T.
• Konferencja: Problemy dynamiki konstrukcji / XIII Sympozjum Dynamiki Konstrukcji (XIII ; 25-27 września 2008 ; Rzeszów-Bystre, Polska)
• Języki publikacji: PL

Abstrakty

EN

The paper deals with some problems of micro-electromechanical system design and testing. Design process of mechanical parts of this micro-systems is discussed. The role of modeling and simulation study for design of micro - systems including structural dynamic problems is presented. Uncertainty of the MEMS structures are common in typical design due to technological manufacturing process which is very little controllable. The influence of system parameters uncertainty on dynamic features variability is discuss. Case study of micro-comb resonator is considered.

Słowa kluczowe

PL

dynamika strukturalna; układ MEMS; dynamika konstrukcji; drgania

EN

structure dynamics; structure MEMS; construction dynamics; vibrations

• Wydawca: Oficyna Wydawnicza Politechniki Rzeszowskiej
• Czasopismo: Zeszyty Naukowe Politechniki Rzeszowskiej. Mechanika
• Rocznik: 2008
• Tom: z. 74 [258]
• Strony: 433--440
• Opis fizyczny: Bibliogr. 22 poz., rys., wykr.

Twórcy

autor

Uhl T.

• Katedra Robotyki i Mechatroniki, Akademia Górniczo-Hutnicza, al. Mickiewicza 30, 30-059 Kraków,

Bibliografia

• [1] C.R. Farrar, D. Brown, I. Bucher, M. Imregum, T.L. Paez, Grand Challenges for Strucctural Dynamics, Proceedings of XIX IMAC Conference, Orlando, FL, 2002.
• [2] S. Baglio, S. Castorina, N. Savalli, Scaling issues and design of MEMS, Wiley, Chichester, 2007.
• [3] J.Giergiel, T. Uhl, Identyfikacja modeli układów mechanicznych, PWN, Warszawa, 1990.
• [4] G. Gerlach, W. Dotzel, Introduction to Microsystems Technology, Wiley, The Wiley Microsystems and nanotechnology Series, Chichester, 2008.
• [5] S.J. O'Shea, P. Lu, F Shen, P. Neuzil, Q.X. Zhang, Out of plane electrostatic actuation of microcentilevers, Nanotechnology, vol. 16, pp. 602 - 608, 2005.
• [6] O.B. Ozdoganlar, B.D. Hansche, T.G. Carne, Experimental Modal Analysis of Microsystems, Proceedings of 21st IMAC Conference, 2003.
• [7] Uhl T. Komputerowe wspomaganie identyfikacji modeli układów mechanicznych, WNT, Warszawa, 1997.
• [8] J.G. Korvink, A. Greiner and Z. Liu, Multiphysics and Multiscale Simulation, Comprehensive Microsystems ,vol 1, pp. 539-557, 2008.
• [9] R.S. Muller, Microdynamics, Sensors and Actuators, A 21 -23, 1990, p. 1 -8.
• [10] A.C.J. Luo, F.Y. Wang, Nonlinear dynamics of micro- electro- mechanical systems with time varying capacitors, Journal of Vibration and Acoustics, 126, pp. 77-83, 2004.
• [11] P. Zhang, X.Tang, B.Shan,J.Brandon,A.Kwan, Analytical and Experimental modal analysis for operational validation and calibration of a miniature silicon sensor, Journal of Sound and Vibration, vol. 214, pp. 903 - 913, 1998.
• [12] S.M. Swei, P.Gao, R.MM. Lin, A dynamic analysis of the suspension structure in hard disc drive using piezofilm actuator, Smart Materials and Structures, vol.10, pp.409-413, 2001.
• [13] C.J. Wilson, D.B. Bogy, An experimental modal analysis technique for microstructure, Journal of Vibration and Acoustics, vol. 118, pp. 1 - 9, 1996.
• [14] D.K. Miu, G.M. Frees, R.S. Gompertz, Tracking Dynamics of read/write head suspension dynamics for high - performance floppy drive system, Journal of Vibration and Acoustics, vol. 112, pp. 33 - 39, 1990.
• [15] Y.F. Chou, L.C. Wang, On the modal testing of microstructures, its theoretical approach and experimental setup, Journal of Vibration and Acoustics, vol. 123, pp. 104- 109,2001.
• [16] W.P. Lai, W.L. Fang, Novel Bulk acoustic Wave hammer to determine the dynamic response of microstructures using pulsed broad bandwidth ultrasonic transducers, Sensors and Actuators A vol. 96, pp. 43 - 52, 2002.
• [17] E.M.Lawrance, K.E. Speller, D.L. Yu, MEMS characterization using Laser Doppler Vibrometer, reliability, testing, and characterization of MEMS/MOEMS, Proc. of SPIE 4980 pp. 51-62,2003.
• [18] C. Rembe, R.S. Muller, Measurement system for full 3Dmotion characterization of MEMS, IEEE Journal of Micromechanical Systems, vol. 9, no. 4, pp. 479 - 488, 2002.
• [19] E.S.Hung, S.D. Santuria, Generating efficient dynamical models of microelectromechanical systems from a few FE simulations run, Journal of Microelectromechanical Systems, vol.8, pp. 280- 289, 1999.
• [20] A. Albers, h. G. Enkler, p. Leslabay, A contribution to the simulation of molded micro components and systems with regard to the grain structure, Proceedings of IDETC/CIE 2008 Conference, paper no. Detc2008-49184.
• [21] Albers, A.; Metz, D., "Influence of the micro structure on the strain of micro components", Microsystem Technologies, Vol. 12, pp. 685- 690, 2006.
• [22] I. Codreanu, A. Martowicz, A. Gallina, L. Pieczonka, T. Uhl, "Study of the Effect of Process Induced Uncertainties on the Performance of a Micro-Comb Resonator", accepted at the 4th International Conference, Mechatronic Systems and Materials (MSM 2008), 14 - 17 July 2008, Biatystok, Poland.