Pompujące własności powierzchni - pompy geterowe

• Autorzy: Markowski L. , Ciszewski A.
• Konferencja: VII Krajowa Konferencja Techniki Próżni (7; 18-21.09.2005; Cedzyna, Polska)
• Języki publikacji: PL

Abstrakty

EN

Most of production processes for articles of the so-called hi-tech class need employing ultrahigh vacuum. At present the degree of miniaturization of electronic circuits reaches such a level that single transistors should be treated in size as nanoscale devices. Accordingly quite esential is to ensure thedeterminate cleannes of vacuum condotions in the course of the production process since even a small admixture originating from residual gases can introduce fault of the obtained device. Apart from the conventional techniques of ultrahigh vacuum generation (turbomolecular pumps, cryotechnique), helpful in this field are becoming the pumps with the active pumping surface, or familiar getters. Action of this pumps consists in adsorption of particles of active gases and consequently, formation of stable compounds on their surfaces as a result of chemical reactions.We can distinguish here evaporable getters with the developed surface obtained by evaporation of a proper material (barium and titanium most of all) as well as the so-called non-evaporable getters (NEG) which are fabricated by fixing a powder of the getter material (usually compounds based on zirconium or titanium as well as other IVB elements of the periodic system) to an adequate substrate by sintering, pressing or cathaphoresis. Getters of this sort usually are activated by heating them to a sufficiently high temperature. In this paper discussed are the pumping mechanism and primary properties of getters that determine their pumping power for selected gases (i.e. the pumping rate, the pump capacity and their regeneration ability). Presented are als some of the wide applications of getters in industry (tubes, displays, monitors of different types, thermal insulations and screens, infrared detectors, photomultipliers etc.) in electronics (fabrication of thin layer systems, optoelectronics) as well as in research work (elementary particle accelerators and laboratory ultrahigh vacuum systems).

Słowa kluczowe

PL

próżnia; pompy geterowe

EN

vacuum technology; ultrahigh vacuum system

• Wydawca: Oficyna Wydawnicza Politechniki Warszawskiej
• Czasopismo: Prace Naukowe Politechniki Warszawskiej. Elektronika
• Rocznik: 2005
• Tom: z. 153
• Strony: 33--40
• Opis fizyczny: Bibliogr. 20 poz., wykr., tab.

Twórcy

autor

Markowski L.

• Instytut Fizyki Doświadczalnej Uniwersytetu Wrocławskiego, 50-204 Wrocław, pl. Maksa Borna 9

autor

Ciszewski A.

• Instytut Fizyki Doświadczalnej Uniwersytetu Wrocławskiego, 50-204 Wrocław, pl. Maksa Borna 9

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