Surface Potential Modeling of a High-k HfO2-Ta2O5 Capacitor in Verilog-A

• Autorzy: Angelov G. V.
• Języki publikacji: EN

Abstrakty

EN

A compact model of a high-k HfO2-Ta2O5 mixed layer capacitor stack is developed in Matlab. Model equations are based on the surface potential PSP model. After fitting the C-V characteristics in Matlab the model is coded in Verilog-A hardware description language and it is implemented as external library in Spectre circuit simulator within Cadence CAD system. The results are validated against the experimental measurements of the HfO2-Ta2O5 stack structure.

Słowa kluczowe

EN

device modeling; compact models; PSP; circuit simulation; high-k gate dielectric; Verilog-A; Spectre

PL

modelowanie elementów elektronicznych; model kompaktowy; PSP; symulacja obwodu; dielektryk bramkowy o wysokiej przenikalności elektrycznej; Verilog-A; Spectre

• Wydawca: Lodz University of Technology. Department of Microelectronics and Computer Science
• Czasopismo: International Journal of Microelectronics and Computer Science
• Rocznik: 2012
• Tom: Vol. 3, nr 3
• Strony: 111--118
• Opis fizyczny: Bibliogr. 17 poz.

Twórcy

autor

Angelov G. V.

• Technical University of Sofia, FETT, Dept. of Microelectronics, ECAD Laboratory,

Bibliografia

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