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FBAR filter with asymmetric frequency response and improved selectivity and passband width

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The paper is dedicated on the improving of the frequency response of FBAR filters by replacement some of the single FBARs with two parallel connected resonators. The method is applied for the basic lattice filter architecture and its modification with twice less number of FBARs. The conditions, which must satisfy the resonator parameters, are derived by theoretical considerations and computer simulations.
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Bibliografia
  • [1] K. Lakin, "Thin film resonator technology", IEEE Trans. Ultrason., Ferroelectr., Freq. Control, vol. 52, No. 5, pp. 707-716, May 2005.
  • [2] R. Aigner, "MEMS in RF filter applications: thin film bulk-acoustic -wave technology", Proc. 13th Int. Conf. Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, June 2-5, 2005. pp. 5-8.
  • [3] R. Ruby, "Review and comparison of bulk acoustic wave FBAR, SMR technology", Proc. 2007 IEEE Int. Ultrasonic Symposium, pp 1029-1040.
  • [4] R. Aigner, "SAW and BAW technologies for RF filter application: A review of relative strengths and weaknesses", Proc. 2008 IEEE Int. Ultrasonic Symposium, pp. 482-589.
  • [5] K. Lakin, "Resonator and filter topologies", ch. 2 in "RF bulk acoustic wave filters for communications", ed. By K.-ya Hashimoto, Artech House, 2009.
  • [6] R. Ruby, "FBAR resonators and filters", ch. 5 in "RF bulk acoustic wave filters for communications", ed. By K.-ya Haihimoto, Artech House, 2009.
  • [7] R. Larson III, P. Bradley, S. Wartenberg, R. Ruby, "Modified Bulterworth - Van Dyke circuit for FBAR resonators and automated measurement system", Proc 2000 IEEE Ultrasonic Symposium, pp. 863- 868.
  • [8] T. Kim et al., "Highly miniaturized RF bandpass filter based on thin film bulk-acoustic wave resonator for 5-GHz-band application", IEEE Trans. on Microwave Theory and Techniques, vol. 54, No. 3, pp. 1218-1228, March 2006.
  • [9] A. Zverev, "Handbook of Filter Synthesis", ch. 8, J. Wiley & Sons, 1967.
  • [10] N. Shibagaki, M. Hikita, "Resonator type filter", US Pat. No 7,385,464 B2/Jun. 102008.
  • [11] I. Uzunov, R. Bradvarov, P. Statev, B. Boyanov, "Easy adjustable FBAR filter circuit", Electronics letters, vol. 46, No. 9, pp. 657-658, Apr 29'", 2010
  • [12] G. Temes, J. LaPatra, "Introduction to Circuit Synthesis and Design", ch. 2, McGraw Hill, 1977.
  • [13] W. Pan, P. Soussan, B. Nauwelaers, H. Tilmans, "A surface micromachined electrostatically tunable film bulk acoustic resonator". Sensors and Actuators, vol. A 126 (2006), pp. 436^146.
  • [14] K. Ostman, S. Sipila, I. Uzunov, N. Tchamov, Novel VCO Architecture Using Series Above-IC FBAR and Parallel LC Resonance, IEEE J. Solid-State Circuits, vol. 41, No. 10, pp. 2248-2256, Oct. 2006.
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bwmeta1.element.baztech-article-LOD7-0029-0055
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