Modele mikroczujników membranowych z falami typu Lamba

• Autorzy: Gołębiowski J.
• Języki publikacji: PL

Abstrakty

PL

W pracy przedstawiono symulację komputerową zjawisk w membranowych mikroczujnikach z ultradźwiękową falą płytową oraz modele czujników wytwarzanych na podłożach z monokrystalicznego krzemu. Praca zawiera kompleksowy opis problemu symulacji, poczynając od zależności fizycznych ciała stałego, z uwzględnieniem modelowania wielowar-stowych membran poprzez opracowanie modeli czujników i ich analizę w różnych warunkach pracy. Wykorzystano zależności analityczne opisujące pola elektromagnetyczne w piezoelektrykach jak również metodę elementów skończonych umożliwiającą obliczanie rozkładu naprężeń i odkształceń membrany kompozytowej wykonanej z materiałów anizotropowych. Istotną nowością jest połączenie zagadnień związanych z naprężeniami i odkształceniami membrany z warunkami rozchodzenia się fali ultradźwiękowej, pozwalającej na rozwiązywanie problemów w różnych warunkach pracy czujnika. Analizowano generowanie i detekcję fali za pomocą międzypalczastych (grzebieniowych) przetworników piezoelektrycznych oraz za pomocą elektromagnetycznych przetworników. Opracowano modele matematyczne czujników dla obu rodzajów przetworników z uwzględnieniem wpływu czynników zewnętrznych działających na powierzchnię membrany, takich jak: ciśnienie, gęstość i lepkość płynu otaczającego membranę. W celu wykonania modelu fizycznego czujnika przedyskutowano właściwości mechaniczne membran wykonanych z krzemu, tlenku i azotku krzemu. Analizowano dobór parametrów technologicznych w procesach plazmowego i anizotropowego trawienia krzemu oraz nanoszenia cienkich warstw z tlenku i azotku krzemu. Dla danej warstwy membrany określono parametry nakładania cienkiej warstwy piezoelektrycznej z tlenku cynku. Wiele uwagi poświęcono badaniom dynamicznym membrany, wykorzystując obliczenia częstotliwości własnych wielowarstwowych membran. Przedstawione modele czujników oraz metody symulacyjne zostały zweryfikowane poprzez badania własne wykonane przez autora oraz przez badania i doświadczenia przeprowadzone w zagranicznych ośrodkach. Stwierdzono przydatność zaproponowanych modeli czujników w procesie analizy, projektowania i wytwarzania membranowych czujników z ultradźwiękowi falami typu Lamba.

EN

The analysis of the phenomena which take place during Lamb wave propagation were presented. The models of the transducers, as well as membrane microsensors and the technology of their production were worked out. The investigations denoted generation, propagation and detection of Lamb waves different in kind and mode. The influence of external factors, disturbance as well as constructional parameters on the conditions of wave propagation, i.e. on phase velocity, its attenuation and the angle of phase shift, were analysed. The modified and new models of membrane microsensors with ultrasonic wave, Lamb type on the silicon base were described. The mathematical modes for the most important kinds of work, i.e. the mass loading, the internal membrane strains, the properties of the environment such as density and viscosity were analysed. The models presented allow to determine the mass sensitivity coefficient as well as measurement's range of the value that is estimated. The pressure, strength, density, viscosity of liquids and gas concentration when the selective absorbent material (the change of the surface density) is used. The interdigital transducers (IDT) as well as electromagnetic transducers (EMT) to generation and detection of Lamb wave were analysed. The model of the membrane sensor used as a delayed line with two piezoelectric transducers was presented. In the sensor the modified Mason model was applied. For these models the analysis of the influence of the environment properties was carried out. The methods of modelling as well as miniature models of the membrane silicon sensors with Lamb waves were described. The specificity of silicone structure modelling, the generated waves' properties, the possibilities of their application to measure of some values were also discussed. The results of the experiments and the verifying of the models seem to indicate that such sensors can be applied (in the range given and under the conditions assumed} in the sensor modelling, simulation and designing.

Słowa kluczowe

PL

mikroczujnik membranowy; fale typu Lamba; fale ultradźwiękowe

EN

microsensor membrane; Lamba type wave; ultrasonic waves

• Wydawca: Wydawnictwo Politechniki Łódzkiej
• Czasopismo: Zeszyty Naukowe. Rozprawy Naukowe / Politechnika Łódzka
• Rocznik: 2001
• Tom: Z. 294
• Strony: 3--184
• Opis fizyczny: Bibliogr. 211 poz.

Twórcy

autor

Gołębiowski J.

• Katedra Przyrządów Półprzewodnikowych i Optoelektronicznych, Wydział Elektrotechniki, Elektroniki, Informatyki i Automatyki, Politechnika Łódzka,

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