Computer modelling of intelligent comb microactuators - survey

• Autorzy: Wiak S.

Warianty tytułu

PL

Mikroaktuatory (inteligentne Mikro-Elektro-Mechaniczne Systemy) - modelowanie komputerowe (przegląd metod)

• Języki publikacji: EN

Abstrakty

EN

The paper is devoted to the complex strategy of modelling and the optimization technique, proposed by author, of intelligent micro-actuators of comb structure. This methodology is based on the lumped parameters and vector field 3-D structural models, applied to the different structure of intelligent MEMS.

PL

W pracy przedstawiono kompleksową strategię komputerowego modelowania i optymalizacji, opracowaną przez autora, inteligentnych mikroaktuatorów o konstrukcji uzębionej. Przedstawiono szerokie spektrum różnych rozwiązań konstrukcyjnych oraz zastosowań mikroaktuatorów o ruchu obrotowym oraz liniowym. Opracowana metodologia jest oparta na zintegrowanym podejściu łączącym modelowanie wektorowe dla trójwymiarowych struktur aktuatorów i opracowane modele obiektowe (modele o parametrach skupionych). Optymalizację wybranych struktur aktuatorów przeprowadzono z wykorzystaniem klasycznych metod deterministycznych oraz algorytmów genetycznych i ewolucyjnych.

Słowa kluczowe

EN

microactuators; solid modelling; MEMS; accelerometer; micromirror; silicon micromoto; genetic algorithms; optimization techniques; computer modelling

PL

mikroaktuatory; modelowanie bryłowe; mikro-elektro-mechaniczne systemy; czujnik przyspieszenia; mikrozwierciadło; mikrosilnik krzemowy; algorytmy genetyczne; techniki optymalizacji; modelowanie komputerowe

• Wydawca: Wydawnictwo Politechniki Łódzkiej
• Czasopismo: Zeszyty Naukowe. Elektryka / Politechnika Łódzka
• Rocznik: 2005
• Tom: z. 105
• Strony: 123--143
• Opis fizyczny: Bibliogr. 31 poz.

Twórcy

autor

Wiak S.

• Technical University of Łódź, Institute of Mechatronics and Information Systems

Bibliografia

• [1] Davies F.R., Rodgers M.S., Montague S.: Design Tools and Issues of Silicon Micromachined (MEMS) Devices, Presented at the 2nd International Conference on Engineering Design and Automation, Maui, Hawaii, August 9-12, 1998.
• [2] Gary K., Fedder, Tamal Mukherjee: Physical design for surface-micromachined MEMS, the 5th ACM/SIGDA Physical Design Workshop, Reston, VA USA, April 15-17, 1996, pp. 53-60.
• [3] Bernhard E. Boser: Surface Micromachining An IC-Compatible Sensor Technology, Berkeley Sensor & Actuator Center Dept. of Electrical Engineering and Computer Sciences University of California, Berkeley.
• [4] Gang Zhang: Design and Simulation of A CMOS-MEMS Accelerometer, Project Report, Carnegie Mellon University,May, 1998.
• [5] Yong Zhou (advisor: prof. Gary K. Fedder, co-advisor: dr. Tamal Mukherjee): Layout Synthesis of Accelerometers, MS Project Report, Department of Electrical and Computer Engineering, Carnegie Mellon University, August, 1998.
• [6] Wiak S., Smółka K.: Electrostatic Comb Accelerometer – Field and Equivalent Circuit Modeling. COMPUMAG 2003. Saratoga Springs, USA, July 2-5, 2003.
• [7] Christoph M., Hoffmann: Geometric And Solid Modeling, Morgan Kaufmann, San Mateo, CA, 1989.
• [8] Wei Sun: Multi-volume CAD Modeling for Heterogeneous Object Design and Fabrication, Journal of Computer Science and Technology, Vol 15, No. 1, 2000, pp. 27-36.
• [9] Sitaraman Iyer, Tamal Mukherjee, Gary K. Fedder: Multi-mode Sensitive Layout Synthesis of Microresonator, International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, April, 1998.
• [10] Sitaraman V. Iyer and Tamal Mukherjee: Numerical Spring Models for Behavioral Simulation of MEMS Inertial Sensors, Proc. SPIE Vol. 4019, p. 55-62.
• [11] Wiak S., Smółka K., Rudnicki M.: Modelling And Optimisation of Intelligent Electrostatic Comb Accelerometr. (S. Wiak, A. Krawczyk, M. Trlep (editors): Computer Engineering in Applied Electromagnetism, Springer, 2005), pp. 99-104.
• [12] Wiak S., Cader A., Drzymała P., Welfle H.: Virtual Modeling and Optical Design of Intelligent Micro-accelerometers; 7th International Conference Artificial Intelligence and Soft Computing – ICAISC 2004; Zakopane 7-11 czerwiec 2004 Springer, Subseries of Lecture Notes in Computer Science, (editors: L. Rutkowski, J. Siekmann, R. Tadesusiewicz, L.A. Zadeh), ss. 942-947.
• [13] Sitaraman Iyer, Yong Zhou, Tamal Mukherjee: Analytical Modeling of Cross-axis Coupling in Micromechanical Springs, MSM ‘99, San Juan, Puerto Rico, April 19-21, 1999.
• [14] Di Barba P., Savini A. and Wiak S. (1994) 2-D numerical simulation of electrostatic micromotor torque, IEE Second International Conference on Computation in Electromagnetics, Nothingham, UK.
• [15] Price R.H., Wood J.E. and Jacobsen S.C.: (1989) Modelling considerations for electrostatic forces in electrostatic microactuators, Sensors and Actuators, 20, 107-114.
• [16] Trimmer W. and Jebens R.: (1989) Harmonic electrostatic motors. Sensors and Actuators, 20, 17 -24.
• [17] Van Dessel M., Johansson T.B., Belmans R. and Geysen W.: “An optimization scheme of electrostatic micromotors based on an equivalent circuit-finite element approach”, ICEM'92, UK, Manchester, Conference Proceedings, 1157-1160, 1992.
• [18] Wiak S.: “Optimal Design of Silicon Micromotors by Use of Field/Circuit Modeling”, COMPUMAG, PE1-13, vol. III, pp.38-39, Evian, July 2-5, 2001.
• [19] Tang C.V.: “Electrostatic Comb Drive Levitation and Control Metod”, Jurnal of Micromechanical Systems, 1992, vol.1, no. 4, December.
• [20] Julian W. Gardner, Vijay K. Varadan and Osama Awadelkarim O.: “Microsensor MEMS and Smart Devices”, J. Wiley, UK, 2001.
• [21] Di Barba P.: „Silicon Electrostatic Microactuators: Numerical Models and Design Optimization”. PhD, Technical University of Lodz, December 2002, supervisor-Prof. S. Wiak.
• [22] Hah D., Hung S. i inni: „ Low voltage MEMS analog micromirror arrays with hidden vertical comb-drive actuators“ Solid-State Sensor, Actuator and Microsystems Workshop Hilton Head Island, South Carolina, June 2-6, 2002, pp. 11-14.
• [23] Li J., Zhang Q.X., Liu A.Q.: „Advanced fiber optical swiches using deep RIE (DRIE) fabrication”, Sensors and Actuators A 102 (2003) pp. 286-295.
• [24] Zhang J., Zhang Z., Lee Y.C, Bright V.M., Neff J.: „Design and investigation of multi-level digitally positioned micromirror for open-loop controlled applications”, Sensors and Actuators A 103 (2003) pp. 271-283.
• [25] Naftali M., Elata D.: „Towards a Linear Response of Vertical Comb-Drive Actuators” Technical Report ETR-2004-01 Israel Institute of Technology, Faculty of Mechanical Engineering.
• [26] Patterson P.R., Hah D. and all: „ A scanning micromirror with angular comb drive actuation”, Oral-presented at the Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, Necada, USA, January 20-24, 2002 pp. 544-547.
• [27] Conat R.A., Nee J.T., Lau K.Y., Muller R.S.: „A flat high-frequency scanning micromirror”.
• [28] Timoshenko S.P., Goodier J.N.: „Theory of elasticity” issue III, London McGraw-Hill International, 1970.
• [29] Roessing T.: „Mirrors with integrated position-sense electronics for optical switching applications”, Analog Dialogue 36-04 (2002).
• [30] Conant R.A., Nee J., Hart M., Solgaard O., Lau K.Y., Muller R.S.: „Robustnes and Reliability of Micoromachined scanning Mirrors” Header for MEOMS 1999.
• [31] Smółka K., Wiak S.: „Complex Strategy in Computer Modelling of Intelligent MEMS”, FCCS’2005 (1st Polish and International PD Forum-Conference on Computer Science), April 12-15, Poland, Conference Proceeding.