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Zintegrowane modele komputerowe mikrosystemów o konstrukcji uzębionej

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Warianty tytułu
EN
Integrated computer models of microsystems with comb structure
Języki publikacji
PL
Abstrakty
PL
EN
Paper deals with the problems of the field and circuit modelling, simulation and optimization of the microsystems in the microscopic scale. The microsystems MEMS may be characterized as the multi-domain systems where the mechanical, electrical and fluidic phenomena have to be considered very detailed on the component level as well as coupled together from the systems point of view. These requirements result in the very complicated design processes. Introduced strategy for design of MEMS included the essential static and dynamic behavior of the device.
Rocznik
Strony
171--174
Opis fizyczny
Bibliogr. 17 poz., wykr.
Twórcy
autor
autor
  • Politechnika Łódzka, Instytut Mechatroniki i Systemów Informatycznych, Wydział Elektrotechniki, Elektroniki, Informatyki i Automatyki
Bibliografia
  • [1] Maluf N., Williams K.: An Introduction to Microelectromechanical Systems Engineering. Artech House, Boston, London, 2004.
  • [2] Harouche I. P. F., Shafai C.: Simulation of shaped comb drive as a stepped actuator for microtweezers application. Sensors and Actuators A, vol. 123-124, 2005, pp. 540-546.
  • [3] PRIME Faraday Partnership, An Introduction to MEMS (Microelectromechanical Systems), PRIME Faraday Technology Watch, The Electronics-Enabled Products Knowledge-Transfer Network, United Kingdom, January 2002 (http://www.primetechnologywatch.org.uk).
  • [4] Sinha R., Liang V. C., Paredis C. J. J., Khosla P. K.: Modeling and simulation methods for design of engineering systems. Journal of Computing and Information Science in Engineering. JCISE01, vol. 1, 2001, pp. 84-91.
  • [5] Baidya B., Gupta S. K., Mukherjee T.: An extraction-based verification methodology for MEMS. Journal of Microelectromechanical Systems, vol. 11, issue 1, February 2002, pp. 2-11.
  • [6] Yurish S. Y., Kirianaki N. V., Myshkin I. L.: World sensors and MEMS markets-analysis and trends. Sensors & Transducers Magazine (S&T e-Digest), vol. 62, issue 12, December 2005, pp. 456-461.
  • [7] Wiak S., Smółka K.: Mikrosilniki krzemowe - technologie i konstrukcje (cz.1). IX Sympozjum PPEE'2000, Wista, 11-14 December 2000, pp. 227-232.
  • [8] Brown K. S.: On the feasibility of integrated optical waveguidebased in-situ monitoring of microelectromechanical systems (MEMS), Phd dissertation. Department of Computer Science and Electrical Engineering, West Virgina Unwersity, Morgantown, West Virginia, 2000.
  • [9] Schwarz P., Haase J.: Behavioral modeling of complex heterogeneous microsystems. Proceedings of the 1st International Forum on Design Languagues (FDL'98), Lausanne, September 1998, vol. 2, pp. 53-62.
  • [10] Schwarz P., Schneider P.: Model library and tool support for MEMS Simulation. Conference on „Microelectronic and MEMS Technology", Edinburgh, Scotland, 30 May-1 June, SPIE Proceedings Series, vol. 4407, 2001, pp. 1-14.
  • [11] Fedder G. K., Iyer S., Mukherjee T.: Automated optimal synthesis of microresonators. International Conference on Solid State Sensors and Actuators, TRANSDUCERS'97, Chicago, June 16-19, vol. 2, 1997, pp. 1109-1112.
  • [12] Conant R. A., Nee J. T., Lau K. Y, Muller R. S.: Aflat high-frequency scanning micromirror, in Technical Digest. Solid-State Sensor and Actuator Workshop, South Carolina, USA, June 4-8, 2000, pp. 6-9.
  • [13] Patterson R. P., Hah D., Nguyen H., Toshioshi H., Chao R., Wu M. C.: A scanning micromirror with angular comb drive actuation. 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, Nevada, USA, January 20-24, 2002, pp. 544-547
  • [14] Seeger J. I., Xuesong J., Kraft M., Boser B. E.: Sense finger dynamics in a ΣΔ force-feedback gyroscope. Tech. Digest of Solid State Sensor and Actuator Workshop, USA, June 2000, pp. 296-299.
  • [15] Francis E. H., Kumaran R., Chua B. L., Logeeswaran V. J.: Electrostatic spring effect on the dynamic performance of micro resonators: International Conference on Modeling and Simulation of Microsystems (MSM 2000), San Diego, CA, USA, March 27-29, 2000, pp. 154-157.
  • [16] Wiak S., Smółka K., Dems M., Komęza K.: Numerical (solid) modeling of 3-d inteiligent comb driver accelerometer structure-mechanical problems. Przegląd Elektrotechniczny 2006, no 5, pp. 68-71.
  • [17] Nguyen C. T.-C.: Micromechanical resonators for oscillators and filters. Proceedings of the IEEE International Ultrasonics Symposium, Seattle, WA, November 7-10, 1995, pp. 489-499.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BWAW-0005-0051
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